9/9/2011	11:50:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2011	11:50:57 AM	Recipe started at 11:50 AM
9/9/2011	11:50:57 AM	Helium valve closed
9/9/2011	11:50:57 AM	H2 valve closed
9/9/2011	11:50:57 AM	BCl3 valve closed
9/9/2011	11:50:57 AM	PH3 valve closed
9/9/2011	11:50:57 AM	SiCl4 pre valve closed
9/9/2011	11:50:57 AM	SiCl4 post valve closed
9/9/2011	11:50:57 AM	Main Vac valve closed
9/9/2011	11:50:57 AM	Bypass valve closed
9/9/2011	11:50:57 AM	Bubbler valve closed
9/9/2011	11:50:57 AM	Helium MFC set to  0.000000
9/9/2011	11:50:57 AM	H2 MFC set to  0.000000
9/9/2011	11:50:57 AM	BCl3 MFC set to  0.000000
9/9/2011	11:50:57 AM	PHl3 MFC set to  0.000000
9/9/2011	11:50:57 AM	SiCl4 MFC set to  0.000000
9/9/2011	11:50:57 AM	Bypass solenoid MFC set to  0.000000
9/9/2011	11:50:57 AM	Tube furnace set to 0
9/9/2011	11:51:00 AM	H2 valve closed
9/9/2011	11:51:00 AM	BCl3 valve closed
9/9/2011	11:51:00 AM	PH3 valve closed
9/9/2011	11:51:00 AM	SiCl4 pre valve closed
9/9/2011	11:51:00 AM	SiCl4 post valve closed
9/9/2011	11:51:00 AM	Main Vac valve closed
9/9/2011	11:51:00 AM	Bypass valve closed
9/9/2011	11:51:00 AM	Bubbler valve closed
9/9/2011	11:51:00 AM	Helium valve opened
9/9/2011	11:51:00 AM	Helium MFC set to  500.000000
9/9/2011	11:51:00 AM	H2 MFC set to  0.000000
9/9/2011	11:51:00 AM	BCl3 MFC set to  0.000000
9/9/2011	11:51:00 AM	PHl3 MFC set to  0.000000
9/9/2011	11:51:00 AM	SiCl4 MFC set to  0.000000
9/9/2011	11:51:00 AM	Bypass solenoid MFC set to  0.000000
9/9/2011	11:51:00 AM	Tube furnace set to 0
9/9/2011	11:52:05 AM	Helium valve closed
9/9/2011	11:52:05 AM	H2 valve closed
9/9/2011	11:52:05 AM	BCl3 valve closed
9/9/2011	11:52:05 AM	PH3 valve closed
9/9/2011	11:52:05 AM	SiCl4 pre valve closed
9/9/2011	11:52:05 AM	SiCl4 post valve closed
9/9/2011	11:52:05 AM	Main Vac valve closed
9/9/2011	11:52:05 AM	Bypass valve closed
9/9/2011	11:52:05 AM	Bubbler valve closed
9/9/2011	11:52:05 AM	Helium MFC set to  0.000000
9/9/2011	11:52:05 AM	H2 MFC set to  0.000000
9/9/2011	11:52:05 AM	BCl3 MFC set to  0.000000
9/9/2011	11:52:05 AM	PHl3 MFC set to  0.000000
9/9/2011	11:52:05 AM	SiCl4 MFC set to  0.000000
9/9/2011	11:52:05 AM	Bypass solenoid MFC set to  0.000000
9/9/2011	11:52:05 AM	Tube furnace set to 0
9/9/2011	11:52:06 AM	Run finished at 11:52 AM
9/9/2011	11:52:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2011	11:58:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2011	11:58:52 AM	Recipe started at 11:58 AM
9/9/2011	11:58:52 AM	Helium valve closed
9/9/2011	11:58:52 AM	H2 valve closed
9/9/2011	11:58:52 AM	BCl3 valve closed
9/9/2011	11:58:52 AM	PH3 valve closed
9/9/2011	11:58:52 AM	SiCl4 pre valve closed
9/9/2011	11:58:52 AM	SiCl4 post valve closed
9/9/2011	11:58:52 AM	Main Vac valve closed
9/9/2011	11:58:52 AM	Bubbler valve closed
9/9/2011	11:58:52 AM	Bypass valve opened
9/9/2011	11:58:52 AM	Helium MFC set to  0.000000
9/9/2011	11:58:52 AM	H2 MFC set to  0.000000
9/9/2011	11:58:52 AM	BCl3 MFC set to  0.000000
9/9/2011	11:58:52 AM	PHl3 MFC set to  0.000000
9/9/2011	11:58:52 AM	SiCl4 MFC set to  0.000000
9/9/2011	11:58:52 AM	Bypass solenoid MFC set to  0.000000
9/9/2011	11:58:52 AM	Tube furnace set to 0
9/9/2011	12:00:00 PM	Helium valve closed
9/9/2011	12:00:00 PM	H2 valve closed
9/9/2011	12:00:00 PM	BCl3 valve closed
9/9/2011	12:00:00 PM	PH3 valve closed
9/9/2011	12:00:00 PM	SiCl4 pre valve closed
9/9/2011	12:00:00 PM	SiCl4 post valve closed
9/9/2011	12:00:00 PM	Main Vac valve closed
9/9/2011	12:00:00 PM	Bubbler valve closed
9/9/2011	12:00:00 PM	Bypass valve opened
9/9/2011	12:00:00 PM	Helium MFC set to  0.000000
9/9/2011	12:00:00 PM	H2 MFC set to  0.000000
9/9/2011	12:00:00 PM	BCl3 MFC set to  0.000000
9/9/2011	12:00:00 PM	PHl3 MFC set to  0.000000
9/9/2011	12:00:00 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:00:00 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:00:00 PM	Tube furnace set to 0
9/9/2011	12:00:24 PM	Run aborted at 12:00 PM
9/9/2011	12:00:24 PM	Helium valve closed
9/9/2011	12:00:24 PM	H2 valve closed
9/9/2011	12:00:24 PM	BCl3 valve closed
9/9/2011	12:00:24 PM	PH3 valve closed
9/9/2011	12:00:24 PM	SiCl4 pre valve closed
9/9/2011	12:00:24 PM	SiCl4 post valve closed
9/9/2011	12:00:24 PM	Bypass valve closed
9/9/2011	12:00:24 PM	Main Vac valve closed
9/9/2011	12:00:24 PM	Bubbler valve closed
9/9/2011	12:00:24 PM	Helium MFC set to  0.000000
9/9/2011	12:00:24 PM	H2 MFC set to  0.000000
9/9/2011	12:00:24 PM	BCl3 MFC set to  0.000000
9/9/2011	12:00:24 PM	PHl3 MFC set to  0.000000
9/9/2011	12:00:24 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:00:24 PM	Tube furnace set to 0
9/9/2011	12:00:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2011	12:00:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/9/2011	12:00:39 PM	Recipe started at 12:00 PM
9/9/2011	12:00:39 PM	Helium valve closed
9/9/2011	12:00:39 PM	H2 valve closed
9/9/2011	12:00:39 PM	BCl3 valve closed
9/9/2011	12:00:39 PM	PH3 valve closed
9/9/2011	12:00:39 PM	SiCl4 pre valve closed
9/9/2011	12:00:39 PM	SiCl4 post valve closed
9/9/2011	12:00:39 PM	Main Vac valve closed
9/9/2011	12:00:39 PM	Bubbler valve closed
9/9/2011	12:00:39 PM	Bypass valve opened
9/9/2011	12:00:39 PM	Helium MFC set to  0.000000
9/9/2011	12:00:39 PM	H2 MFC set to  0.000000
9/9/2011	12:00:39 PM	BCl3 MFC set to  0.000000
9/9/2011	12:00:39 PM	PHl3 MFC set to  0.000000
9/9/2011	12:00:39 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:00:39 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:00:39 PM	Tube furnace set to 0
9/9/2011	12:00:40 PM	Helium valve closed
9/9/2011	12:00:40 PM	H2 valve closed
9/9/2011	12:00:40 PM	BCl3 valve closed
9/9/2011	12:00:40 PM	PH3 valve closed
9/9/2011	12:00:40 PM	SiCl4 pre valve closed
9/9/2011	12:00:40 PM	SiCl4 post valve closed
9/9/2011	12:00:40 PM	Main Vac valve closed
9/9/2011	12:00:40 PM	Bubbler valve closed
9/9/2011	12:00:40 PM	Bypass valve opened
9/9/2011	12:00:40 PM	Helium MFC set to  0.000000
9/9/2011	12:00:40 PM	H2 MFC set to  0.000000
9/9/2011	12:00:40 PM	BCl3 MFC set to  0.000000
9/9/2011	12:00:40 PM	PHl3 MFC set to  0.000000
9/9/2011	12:00:40 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:00:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:00:40 PM	Tube furnace set to 0
9/9/2011	12:01:10 PM	Helium valve closed
9/9/2011	12:01:10 PM	H2 valve closed
9/9/2011	12:01:10 PM	BCl3 valve closed
9/9/2011	12:01:10 PM	PH3 valve closed
9/9/2011	12:01:10 PM	SiCl4 pre valve closed
9/9/2011	12:01:10 PM	SiCl4 post valve closed
9/9/2011	12:01:10 PM	Bypass valve closed
9/9/2011	12:01:10 PM	Bubbler valve closed
9/9/2011	12:01:10 PM	Main Vac valve opened
9/9/2011	12:01:10 PM	Helium MFC set to  0.000000
9/9/2011	12:01:10 PM	H2 MFC set to  0.000000
9/9/2011	12:01:10 PM	BCl3 MFC set to  0.000000
9/9/2011	12:01:10 PM	PHl3 MFC set to  0.000000
9/9/2011	12:01:10 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:01:10 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:01:10 PM	Tube furnace set to 0
9/9/2011	12:01:40 PM	H2 valve closed
9/9/2011	12:01:40 PM	BCl3 valve closed
9/9/2011	12:01:40 PM	PH3 valve closed
9/9/2011	12:01:40 PM	SiCl4 pre valve closed
9/9/2011	12:01:40 PM	SiCl4 post valve closed
9/9/2011	12:01:40 PM	Bypass valve closed
9/9/2011	12:01:40 PM	Bubbler valve closed
9/9/2011	12:01:40 PM	Helium valve opened
9/9/2011	12:01:40 PM	Main Vac valve opened
9/9/2011	12:01:40 PM	Helium MFC set to  20.000000
9/9/2011	12:01:40 PM	H2 MFC set to  0.000000
9/9/2011	12:01:40 PM	BCl3 MFC set to  0.000000
9/9/2011	12:01:40 PM	PHl3 MFC set to  0.000000
9/9/2011	12:01:40 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:01:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:01:40 PM	Tube furnace set to 0
9/9/2011	12:02:10 PM	Helium valve closed
9/9/2011	12:02:10 PM	H2 valve closed
9/9/2011	12:02:10 PM	BCl3 valve closed
9/9/2011	12:02:10 PM	PH3 valve closed
9/9/2011	12:02:10 PM	SiCl4 pre valve closed
9/9/2011	12:02:10 PM	SiCl4 post valve closed
9/9/2011	12:02:10 PM	Bypass valve closed
9/9/2011	12:02:10 PM	Bubbler valve closed
9/9/2011	12:02:10 PM	Main Vac valve opened
9/9/2011	12:02:10 PM	Helium MFC set to  0.000000
9/9/2011	12:02:10 PM	H2 MFC set to  0.000000
9/9/2011	12:02:10 PM	BCl3 MFC set to  0.000000
9/9/2011	12:02:10 PM	PHl3 MFC set to  0.000000
9/9/2011	12:02:10 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:02:10 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:02:10 PM	Tube furnace set to 0
9/9/2011	12:02:40 PM	H2 valve closed
9/9/2011	12:02:40 PM	BCl3 valve closed
9/9/2011	12:02:40 PM	PH3 valve closed
9/9/2011	12:02:40 PM	SiCl4 pre valve closed
9/9/2011	12:02:40 PM	SiCl4 post valve closed
9/9/2011	12:02:40 PM	Bypass valve closed
9/9/2011	12:02:40 PM	Bubbler valve closed
9/9/2011	12:02:40 PM	Helium valve opened
9/9/2011	12:02:40 PM	Main Vac valve opened
9/9/2011	12:02:40 PM	Helium MFC set to  20.000000
9/9/2011	12:02:40 PM	H2 MFC set to  0.000000
9/9/2011	12:02:40 PM	BCl3 MFC set to  0.000000
9/9/2011	12:02:40 PM	PHl3 MFC set to  0.000000
9/9/2011	12:02:40 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:02:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:02:41 PM	Tube furnace set to 0
9/9/2011	12:03:11 PM	Helium valve closed
9/9/2011	12:03:11 PM	H2 valve closed
9/9/2011	12:03:11 PM	BCl3 valve closed
9/9/2011	12:03:11 PM	PH3 valve closed
9/9/2011	12:03:11 PM	SiCl4 pre valve closed
9/9/2011	12:03:11 PM	SiCl4 post valve closed
9/9/2011	12:03:11 PM	Bypass valve closed
9/9/2011	12:03:11 PM	Bubbler valve closed
9/9/2011	12:03:11 PM	Main Vac valve opened
9/9/2011	12:03:11 PM	Helium MFC set to  0.000000
9/9/2011	12:03:11 PM	H2 MFC set to  0.000000
9/9/2011	12:03:11 PM	BCl3 MFC set to  0.000000
9/9/2011	12:03:11 PM	PHl3 MFC set to  0.000000
9/9/2011	12:03:11 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:03:11 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:03:11 PM	Tube furnace set to 0
9/9/2011	12:03:41 PM	H2 valve closed
9/9/2011	12:03:41 PM	BCl3 valve closed
9/9/2011	12:03:41 PM	PH3 valve closed
9/9/2011	12:03:41 PM	SiCl4 pre valve closed
9/9/2011	12:03:41 PM	SiCl4 post valve closed
9/9/2011	12:03:41 PM	Bypass valve closed
9/9/2011	12:03:41 PM	Bubbler valve closed
9/9/2011	12:03:41 PM	Helium valve opened
9/9/2011	12:03:41 PM	Main Vac valve opened
9/9/2011	12:03:41 PM	Helium MFC set to  20.000000
9/9/2011	12:03:41 PM	H2 MFC set to  0.000000
9/9/2011	12:03:41 PM	BCl3 MFC set to  0.000000
9/9/2011	12:03:41 PM	PHl3 MFC set to  0.000000
9/9/2011	12:03:41 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:03:41 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:03:41 PM	Tube furnace set to 0
9/9/2011	12:04:11 PM	Helium valve closed
9/9/2011	12:04:11 PM	H2 valve closed
9/9/2011	12:04:11 PM	BCl3 valve closed
9/9/2011	12:04:11 PM	PH3 valve closed
9/9/2011	12:04:11 PM	SiCl4 pre valve closed
9/9/2011	12:04:11 PM	SiCl4 post valve closed
9/9/2011	12:04:11 PM	Bypass valve closed
9/9/2011	12:04:11 PM	Bubbler valve closed
9/9/2011	12:04:11 PM	Main Vac valve opened
9/9/2011	12:04:11 PM	Helium MFC set to  0.000000
9/9/2011	12:04:11 PM	H2 MFC set to  0.000000
9/9/2011	12:04:11 PM	BCl3 MFC set to  0.000000
9/9/2011	12:04:11 PM	PHl3 MFC set to  0.000000
9/9/2011	12:04:11 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:04:11 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:04:11 PM	Tube furnace set to 0
9/9/2011	12:04:41 PM	H2 valve closed
9/9/2011	12:04:41 PM	BCl3 valve closed
9/9/2011	12:04:41 PM	PH3 valve closed
9/9/2011	12:04:41 PM	SiCl4 pre valve closed
9/9/2011	12:04:41 PM	SiCl4 post valve closed
9/9/2011	12:04:41 PM	Bypass valve closed
9/9/2011	12:04:41 PM	Bubbler valve closed
9/9/2011	12:04:41 PM	Helium valve opened
9/9/2011	12:04:41 PM	Main Vac valve opened
9/9/2011	12:04:41 PM	Helium MFC set to  20.000000
9/9/2011	12:04:41 PM	H2 MFC set to  0.000000
9/9/2011	12:04:41 PM	BCl3 MFC set to  0.000000
9/9/2011	12:04:41 PM	PHl3 MFC set to  0.000000
9/9/2011	12:04:41 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:04:41 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:04:41 PM	Tube furnace set to 0
9/9/2011	12:05:11 PM	Helium valve closed
9/9/2011	12:05:11 PM	H2 valve closed
9/9/2011	12:05:11 PM	BCl3 valve closed
9/9/2011	12:05:11 PM	PH3 valve closed
9/9/2011	12:05:11 PM	SiCl4 pre valve closed
9/9/2011	12:05:11 PM	SiCl4 post valve closed
9/9/2011	12:05:11 PM	Bypass valve closed
9/9/2011	12:05:11 PM	Bubbler valve closed
9/9/2011	12:05:11 PM	Main Vac valve opened
9/9/2011	12:05:11 PM	Helium MFC set to  0.000000
9/9/2011	12:05:11 PM	H2 MFC set to  0.000000
9/9/2011	12:05:11 PM	BCl3 MFC set to  0.000000
9/9/2011	12:05:11 PM	PHl3 MFC set to  0.000000
9/9/2011	12:05:11 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:05:11 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:05:12 PM	Tube furnace set to 0
9/9/2011	12:05:31 PM	Run aborted at 12:05 PM
9/9/2011	12:05:31 PM	Helium valve closed
9/9/2011	12:05:31 PM	H2 valve closed
9/9/2011	12:05:31 PM	BCl3 valve closed
9/9/2011	12:05:31 PM	PH3 valve closed
9/9/2011	12:05:31 PM	SiCl4 pre valve closed
9/9/2011	12:05:31 PM	SiCl4 post valve closed
9/9/2011	12:05:31 PM	Bypass valve closed
9/9/2011	12:05:31 PM	Main Vac valve closed
9/9/2011	12:05:31 PM	Bubbler valve closed
9/9/2011	12:05:31 PM	Helium MFC set to  0.000000
9/9/2011	12:05:31 PM	H2 MFC set to  0.000000
9/9/2011	12:05:31 PM	BCl3 MFC set to  0.000000
9/9/2011	12:05:31 PM	PHl3 MFC set to  0.000000
9/9/2011	12:05:31 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:05:31 PM	Tube furnace set to 0
9/9/2011	12:05:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/9/2011	12:05:39 PM	Main Vac valve opened
9/9/2011	12:05:43 PM	Tube furnace set to 200
9/9/2011	12:14:33 PM	Recipe started at 12:14 PM
9/9/2011	12:14:33 PM	Helium valve closed
9/9/2011	12:14:33 PM	H2 valve closed
9/9/2011	12:14:33 PM	BCl3 valve closed
9/9/2011	12:14:33 PM	PH3 valve closed
9/9/2011	12:14:33 PM	SiCl4 pre valve closed
9/9/2011	12:14:33 PM	SiCl4 post valve closed
9/9/2011	12:14:33 PM	Main Vac valve closed
9/9/2011	12:14:33 PM	Bypass valve closed
9/9/2011	12:14:33 PM	Bubbler valve closed
9/9/2011	12:14:33 PM	Helium MFC set to  0.000000
9/9/2011	12:14:33 PM	H2 MFC set to  0.000000
9/9/2011	12:14:33 PM	BCl3 MFC set to  0.000000
9/9/2011	12:14:33 PM	PHl3 MFC set to  0.000000
9/9/2011	12:14:33 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:14:33 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:14:33 PM	Tube furnace set to 0
9/9/2011	12:14:36 PM	H2 valve closed
9/9/2011	12:14:36 PM	BCl3 valve closed
9/9/2011	12:14:36 PM	PH3 valve closed
9/9/2011	12:14:36 PM	SiCl4 pre valve closed
9/9/2011	12:14:36 PM	SiCl4 post valve closed
9/9/2011	12:14:36 PM	Main Vac valve closed
9/9/2011	12:14:36 PM	Bypass valve closed
9/9/2011	12:14:36 PM	Bubbler valve closed
9/9/2011	12:14:36 PM	Helium valve opened
9/9/2011	12:14:36 PM	Helium MFC set to  500.000000
9/9/2011	12:14:36 PM	H2 MFC set to  0.000000
9/9/2011	12:14:36 PM	BCl3 MFC set to  0.000000
9/9/2011	12:14:36 PM	PHl3 MFC set to  0.000000
9/9/2011	12:14:36 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:14:36 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:14:37 PM	Tube furnace set to 0
9/9/2011	12:15:40 PM	H2 valve closed
9/9/2011	12:15:40 PM	BCl3 valve closed
9/9/2011	12:15:40 PM	PH3 valve closed
9/9/2011	12:15:40 PM	SiCl4 pre valve closed
9/9/2011	12:15:40 PM	SiCl4 post valve closed
9/9/2011	12:15:40 PM	Main Vac valve closed
9/9/2011	12:15:40 PM	Bypass valve closed
9/9/2011	12:15:40 PM	Helium valve opened
9/9/2011	12:15:40 PM	Bubbler valve opened
9/9/2011	12:15:40 PM	Helium MFC set to  500.000000
9/9/2011	12:15:40 PM	H2 MFC set to  0.000000
9/9/2011	12:15:40 PM	BCl3 MFC set to  0.000000
9/9/2011	12:15:40 PM	PHl3 MFC set to  0.000000
9/9/2011	12:15:40 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:15:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:15:40 PM	Tube furnace set to 0
9/9/2011	12:16:10 PM	Helium valve closed
9/9/2011	12:16:10 PM	H2 valve closed
9/9/2011	12:16:10 PM	BCl3 valve closed
9/9/2011	12:16:10 PM	PH3 valve closed
9/9/2011	12:16:10 PM	SiCl4 pre valve closed
9/9/2011	12:16:10 PM	SiCl4 post valve closed
9/9/2011	12:16:10 PM	Main Vac valve closed
9/9/2011	12:16:10 PM	Bubbler valve closed
9/9/2011	12:16:10 PM	Bypass valve opened
9/9/2011	12:16:10 PM	Helium MFC set to  0.000000
9/9/2011	12:16:10 PM	H2 MFC set to  0.000000
9/9/2011	12:16:10 PM	BCl3 MFC set to  0.000000
9/9/2011	12:16:10 PM	PHl3 MFC set to  0.000000
9/9/2011	12:16:10 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:16:10 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:16:10 PM	Tube furnace set to 0
9/9/2011	12:17:00 PM	Helium valve closed
9/9/2011	12:17:00 PM	H2 valve closed
9/9/2011	12:17:00 PM	BCl3 valve closed
9/9/2011	12:17:00 PM	PH3 valve closed
9/9/2011	12:17:00 PM	SiCl4 pre valve closed
9/9/2011	12:17:00 PM	SiCl4 post valve closed
9/9/2011	12:17:00 PM	Main Vac valve closed
9/9/2011	12:17:00 PM	Bubbler valve closed
9/9/2011	12:17:00 PM	Bypass valve opened
9/9/2011	12:17:00 PM	Helium MFC set to  0.000000
9/9/2011	12:17:00 PM	H2 MFC set to  0.000000
9/9/2011	12:17:00 PM	BCl3 MFC set to  0.000000
9/9/2011	12:17:00 PM	PHl3 MFC set to  0.000000
9/9/2011	12:17:00 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:17:00 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:17:00 PM	Tube furnace set to 0
9/9/2011	12:18:00 PM	Helium valve closed
9/9/2011	12:18:00 PM	H2 valve closed
9/9/2011	12:18:00 PM	BCl3 valve closed
9/9/2011	12:18:00 PM	PH3 valve closed
9/9/2011	12:18:00 PM	SiCl4 pre valve closed
9/9/2011	12:18:00 PM	SiCl4 post valve closed
9/9/2011	12:18:00 PM	Bypass valve closed
9/9/2011	12:18:00 PM	Bubbler valve closed
9/9/2011	12:18:00 PM	Main Vac valve opened
9/9/2011	12:18:00 PM	Helium MFC set to  0.000000
9/9/2011	12:18:00 PM	H2 MFC set to  0.000000
9/9/2011	12:18:00 PM	BCl3 MFC set to  0.000000
9/9/2011	12:18:00 PM	PHl3 MFC set to  0.000000
9/9/2011	12:18:00 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:18:00 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:18:01 PM	Tube furnace set to 0
9/9/2011	12:48:00 PM	Helium valve closed
9/9/2011	12:48:00 PM	H2 valve closed
9/9/2011	12:48:00 PM	BCl3 valve closed
9/9/2011	12:48:01 PM	PH3 valve closed
9/9/2011	12:48:01 PM	SiCl4 pre valve closed
9/9/2011	12:48:01 PM	SiCl4 post valve closed
9/9/2011	12:48:01 PM	Bypass valve closed
9/9/2011	12:48:01 PM	Bubbler valve closed
9/9/2011	12:48:01 PM	Main Vac valve opened
9/9/2011	12:48:01 PM	Helium MFC set to  0.000000
9/9/2011	12:48:01 PM	H2 MFC set to  0.000000
9/9/2011	12:48:01 PM	BCl3 MFC set to  0.000000
9/9/2011	12:48:01 PM	PHl3 MFC set to  0.000000
9/9/2011	12:48:01 PM	SiCl4 MFC set to  0.000000
9/9/2011	12:48:01 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	12:48:01 PM	Tube furnace set to 1000
9/9/2011	1:18:01 PM	Helium valve closed
9/9/2011	1:18:01 PM	BCl3 valve closed
9/9/2011	1:18:01 PM	PH3 valve closed
9/9/2011	1:18:01 PM	SiCl4 pre valve closed
9/9/2011	1:18:01 PM	SiCl4 post valve closed
9/9/2011	1:18:01 PM	Main Vac valve closed
9/9/2011	1:18:01 PM	Bypass valve closed
9/9/2011	1:18:01 PM	Bubbler valve closed
9/9/2011	1:18:01 PM	H2 valve opened
9/9/2011	1:18:01 PM	Helium MFC set to  0.000000
9/9/2011	1:18:01 PM	H2 MFC set to  500.000000
9/9/2011	1:18:01 PM	BCl3 MFC set to  0.000000
9/9/2011	1:18:01 PM	PHl3 MFC set to  0.000000
9/9/2011	1:18:01 PM	SiCl4 MFC set to  0.000000
9/9/2011	1:18:01 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	1:18:01 PM	Tube furnace set to 1000
9/9/2011	1:18:55 PM	Helium valve closed
9/9/2011	1:18:55 PM	BCl3 valve closed
9/9/2011	1:18:55 PM	PH3 valve closed
9/9/2011	1:18:55 PM	SiCl4 pre valve closed
9/9/2011	1:18:55 PM	SiCl4 post valve closed
9/9/2011	1:18:55 PM	Main Vac valve closed
9/9/2011	1:18:55 PM	Bypass valve closed
9/9/2011	1:18:55 PM	H2 valve opened
9/9/2011	1:18:55 PM	Bubbler valve opened
9/9/2011	1:18:55 PM	Helium MFC set to  0.000000
9/9/2011	1:18:55 PM	H2 MFC set to  500.000000
9/9/2011	1:18:55 PM	BCl3 MFC set to  0.000000
9/9/2011	1:18:55 PM	PHl3 MFC set to  0.000000
9/9/2011	1:18:55 PM	SiCl4 MFC set to  0.000000
9/9/2011	1:18:55 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	1:18:56 PM	Tube furnace set to 1000
9/9/2011	1:38:55 PM	Helium valve closed
9/9/2011	1:38:55 PM	PH3 valve closed
9/9/2011	1:38:55 PM	Main Vac valve closed
9/9/2011	1:38:55 PM	Bypass valve closed
9/9/2011	1:38:55 PM	H2 valve opened
9/9/2011	1:38:55 PM	BCl3 valve opened
9/9/2011	1:38:55 PM	SiCl4 pre valve opened
9/9/2011	1:38:56 PM	SiCl4 post valve opened
9/9/2011	1:38:56 PM	Bubbler valve opened
9/9/2011	1:38:56 PM	Helium MFC set to  0.000000
9/9/2011	1:38:56 PM	H2 MFC set to  500.000000
9/9/2011	1:38:56 PM	BCl3 MFC set to  2.500000
9/9/2011	1:38:56 PM	PHl3 MFC set to  0.000000
9/9/2011	1:38:56 PM	SiCl4 MFC set to  50.000000
9/9/2011	1:38:56 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	1:38:56 PM	Tube furnace set to 1000
9/9/2011	1:48:56 PM	Helium valve closed
9/9/2011	1:48:56 PM	BCl3 valve closed
9/9/2011	1:48:56 PM	PH3 valve closed
9/9/2011	1:48:56 PM	SiCl4 pre valve closed
9/9/2011	1:48:56 PM	SiCl4 post valve closed
9/9/2011	1:48:56 PM	Main Vac valve closed
9/9/2011	1:48:56 PM	Bypass valve closed
9/9/2011	1:48:56 PM	H2 valve opened
9/9/2011	1:48:56 PM	Bubbler valve opened
9/9/2011	1:48:56 PM	Helium MFC set to  0.000000
9/9/2011	1:48:56 PM	H2 MFC set to  500.000000
9/9/2011	1:48:56 PM	BCl3 MFC set to  0.000000
9/9/2011	1:48:56 PM	PHl3 MFC set to  0.000000
9/9/2011	1:48:56 PM	SiCl4 MFC set to  0.000000
9/9/2011	1:48:56 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	1:48:56 PM	Tube furnace set to 0
9/9/2011	1:53:56 PM	H2 valve closed
9/9/2011	1:53:56 PM	BCl3 valve closed
9/9/2011	1:53:56 PM	PH3 valve closed
9/9/2011	1:53:56 PM	SiCl4 pre valve closed
9/9/2011	1:53:56 PM	SiCl4 post valve closed
9/9/2011	1:53:56 PM	Main Vac valve closed
9/9/2011	1:53:56 PM	Bypass valve closed
9/9/2011	1:53:56 PM	Helium valve opened
9/9/2011	1:53:56 PM	Bubbler valve opened
9/9/2011	1:53:56 PM	Helium MFC set to  500.000000
9/9/2011	1:53:56 PM	H2 MFC set to  0.000000
9/9/2011	1:53:56 PM	BCl3 MFC set to  0.000000
9/9/2011	1:53:56 PM	PHl3 MFC set to  0.000000
9/9/2011	1:53:56 PM	SiCl4 MFC set to  0.000000
9/9/2011	1:53:56 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	1:53:56 PM	Tube furnace set to 0
9/9/2011	2:23:56 PM	Helium valve closed
9/9/2011	2:23:56 PM	H2 valve closed
9/9/2011	2:23:56 PM	BCl3 valve closed
9/9/2011	2:23:56 PM	PH3 valve closed
9/9/2011	2:23:56 PM	SiCl4 pre valve closed
9/9/2011	2:23:56 PM	SiCl4 post valve closed
9/9/2011	2:23:56 PM	Main Vac valve closed
9/9/2011	2:23:56 PM	Bypass valve closed
9/9/2011	2:23:56 PM	Bubbler valve closed
9/9/2011	2:23:56 PM	Helium MFC set to  0.000000
9/9/2011	2:23:56 PM	H2 MFC set to  0.000000
9/9/2011	2:23:56 PM	BCl3 MFC set to  0.000000
9/9/2011	2:23:56 PM	PHl3 MFC set to  0.000000
9/9/2011	2:23:56 PM	SiCl4 MFC set to  0.000000
9/9/2011	2:23:56 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	2:23:56 PM	Tube furnace set to 0
9/9/2011	2:53:56 PM	Helium valve closed
9/9/2011	2:53:56 PM	H2 valve closed
9/9/2011	2:53:56 PM	BCl3 valve closed
9/9/2011	2:53:56 PM	PH3 valve closed
9/9/2011	2:53:56 PM	SiCl4 pre valve closed
9/9/2011	2:53:56 PM	SiCl4 post valve closed
9/9/2011	2:53:56 PM	Main Vac valve closed
9/9/2011	2:53:56 PM	Bubbler valve closed
9/9/2011	2:53:56 PM	Bypass valve opened
9/9/2011	2:53:56 PM	Helium MFC set to  0.000000
9/9/2011	2:53:56 PM	H2 MFC set to  0.000000
9/9/2011	2:53:56 PM	BCl3 MFC set to  0.000000
9/9/2011	2:53:56 PM	PHl3 MFC set to  0.000000
9/9/2011	2:53:56 PM	SiCl4 MFC set to  0.000000
9/9/2011	2:53:56 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	2:53:56 PM	Tube furnace set to 0
9/9/2011	2:54:46 PM	Helium valve closed
9/9/2011	2:54:46 PM	H2 valve closed
9/9/2011	2:54:46 PM	BCl3 valve closed
9/9/2011	2:54:46 PM	PH3 valve closed
9/9/2011	2:54:46 PM	SiCl4 pre valve closed
9/9/2011	2:54:46 PM	SiCl4 post valve closed
9/9/2011	2:54:46 PM	Main Vac valve closed
9/9/2011	2:54:46 PM	Bubbler valve closed
9/9/2011	2:54:46 PM	Bypass valve opened
9/9/2011	2:54:46 PM	Helium MFC set to  0.000000
9/9/2011	2:54:46 PM	H2 MFC set to  0.000000
9/9/2011	2:54:46 PM	BCl3 MFC set to  0.000000
9/9/2011	2:54:46 PM	PHl3 MFC set to  0.000000
9/9/2011	2:54:46 PM	SiCl4 MFC set to  0.000000
9/9/2011	2:54:46 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	2:54:46 PM	Tube furnace set to 0
9/9/2011	2:56:46 PM	Helium valve closed
9/9/2011	2:56:46 PM	H2 valve closed
9/9/2011	2:56:46 PM	BCl3 valve closed
9/9/2011	2:56:46 PM	PH3 valve closed
9/9/2011	2:56:46 PM	SiCl4 pre valve closed
9/9/2011	2:56:46 PM	SiCl4 post valve closed
9/9/2011	2:56:46 PM	Bypass valve closed
9/9/2011	2:56:46 PM	Bubbler valve closed
9/9/2011	2:56:46 PM	Main Vac valve opened
9/9/2011	2:56:46 PM	Helium MFC set to  0.000000
9/9/2011	2:56:46 PM	H2 MFC set to  0.000000
9/9/2011	2:56:46 PM	BCl3 MFC set to  0.000000
9/9/2011	2:56:46 PM	PHl3 MFC set to  0.000000
9/9/2011	2:56:46 PM	SiCl4 MFC set to  0.000000
9/9/2011	2:56:46 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	2:56:46 PM	Tube furnace set to 0
9/9/2011	2:56:47 PM	Run finished at 2:56 PM
9/9/2011	3:41:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2011	3:41:32 PM	Recipe started at 3:41 PM
9/9/2011	3:41:32 PM	Helium valve closed
9/9/2011	3:41:32 PM	H2 valve closed
9/9/2011	3:41:32 PM	BCl3 valve closed
9/9/2011	3:41:32 PM	PH3 valve closed
9/9/2011	3:41:32 PM	SiCl4 pre valve closed
9/9/2011	3:41:32 PM	SiCl4 post valve closed
9/9/2011	3:41:32 PM	Main Vac valve closed
9/9/2011	3:41:32 PM	Bypass valve closed
9/9/2011	3:41:32 PM	Bubbler valve closed
9/9/2011	3:41:32 PM	Helium MFC set to  0.000000
9/9/2011	3:41:32 PM	H2 MFC set to  0.000000
9/9/2011	3:41:32 PM	BCl3 MFC set to  0.000000
9/9/2011	3:41:32 PM	PHl3 MFC set to  0.000000
9/9/2011	3:41:32 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:41:32 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:41:32 PM	Tube furnace set to 0
9/9/2011	3:41:35 PM	H2 valve closed
9/9/2011	3:41:35 PM	BCl3 valve closed
9/9/2011	3:41:35 PM	PH3 valve closed
9/9/2011	3:41:35 PM	SiCl4 pre valve closed
9/9/2011	3:41:35 PM	SiCl4 post valve closed
9/9/2011	3:41:35 PM	Main Vac valve closed
9/9/2011	3:41:35 PM	Bypass valve closed
9/9/2011	3:41:35 PM	Bubbler valve closed
9/9/2011	3:41:35 PM	Helium valve opened
9/9/2011	3:41:35 PM	Helium MFC set to  500.000000
9/9/2011	3:41:35 PM	H2 MFC set to  0.000000
9/9/2011	3:41:35 PM	BCl3 MFC set to  0.000000
9/9/2011	3:41:35 PM	PHl3 MFC set to  0.000000
9/9/2011	3:41:35 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:41:35 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:41:35 PM	Tube furnace set to 0
9/9/2011	3:42:36 PM	Helium valve closed
9/9/2011	3:42:36 PM	H2 valve closed
9/9/2011	3:42:36 PM	BCl3 valve closed
9/9/2011	3:42:36 PM	PH3 valve closed
9/9/2011	3:42:37 PM	SiCl4 pre valve closed
9/9/2011	3:42:37 PM	SiCl4 post valve closed
9/9/2011	3:42:37 PM	Main Vac valve closed
9/9/2011	3:42:37 PM	Bypass valve closed
9/9/2011	3:42:37 PM	Bubbler valve closed
9/9/2011	3:42:37 PM	Helium MFC set to  0.000000
9/9/2011	3:42:37 PM	H2 MFC set to  0.000000
9/9/2011	3:42:37 PM	BCl3 MFC set to  0.000000
9/9/2011	3:42:37 PM	PHl3 MFC set to  0.000000
9/9/2011	3:42:37 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:42:37 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:42:37 PM	Tube furnace set to 0
9/9/2011	3:42:38 PM	Run finished at 3:42 PM
9/9/2011	3:42:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2011	3:44:37 PM	Helium MFC set to  500.000000
9/9/2011	3:44:39 PM	Helium valve opened
9/9/2011	3:44:44 PM	Bubbler valve opened
9/9/2011	3:51:25 PM	Bubbler valve closed
9/9/2011	3:51:26 PM	Helium valve closed
9/9/2011	3:51:29 PM	Helium MFC set to  0.000000
9/9/2011	3:51:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2011	3:51:40 PM	Recipe started at 3:51 PM
9/9/2011	3:51:40 PM	Helium valve closed
9/9/2011	3:51:40 PM	H2 valve closed
9/9/2011	3:51:40 PM	BCl3 valve closed
9/9/2011	3:51:40 PM	PH3 valve closed
9/9/2011	3:51:40 PM	SiCl4 pre valve closed
9/9/2011	3:51:40 PM	SiCl4 post valve closed
9/9/2011	3:51:40 PM	Main Vac valve closed
9/9/2011	3:51:40 PM	Bubbler valve closed
9/9/2011	3:51:40 PM	Bypass valve opened
9/9/2011	3:51:40 PM	Helium MFC set to  0.000000
9/9/2011	3:51:40 PM	H2 MFC set to  0.000000
9/9/2011	3:51:40 PM	BCl3 MFC set to  0.000000
9/9/2011	3:51:40 PM	PHl3 MFC set to  0.000000
9/9/2011	3:51:40 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:51:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:51:40 PM	Tube furnace set to 0
9/9/2011	3:52:36 PM	Helium valve closed
9/9/2011	3:52:36 PM	H2 valve closed
9/9/2011	3:52:36 PM	BCl3 valve closed
9/9/2011	3:52:36 PM	PH3 valve closed
9/9/2011	3:52:36 PM	SiCl4 pre valve closed
9/9/2011	3:52:36 PM	SiCl4 post valve closed
9/9/2011	3:52:36 PM	Main Vac valve closed
9/9/2011	3:52:36 PM	Bubbler valve closed
9/9/2011	3:52:36 PM	Bypass valve opened
9/9/2011	3:52:36 PM	Helium MFC set to  0.000000
9/9/2011	3:52:36 PM	H2 MFC set to  0.000000
9/9/2011	3:52:36 PM	BCl3 MFC set to  0.000000
9/9/2011	3:52:36 PM	PHl3 MFC set to  0.000000
9/9/2011	3:52:36 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:52:36 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:52:36 PM	Tube furnace set to 0
9/9/2011	3:53:36 PM	Helium valve closed
9/9/2011	3:53:36 PM	H2 valve closed
9/9/2011	3:53:36 PM	BCl3 valve closed
9/9/2011	3:53:36 PM	PH3 valve closed
9/9/2011	3:53:36 PM	SiCl4 pre valve closed
9/9/2011	3:53:36 PM	SiCl4 post valve closed
9/9/2011	3:53:36 PM	Bypass valve closed
9/9/2011	3:53:36 PM	Bubbler valve closed
9/9/2011	3:53:36 PM	Main Vac valve opened
9/9/2011	3:53:36 PM	Helium MFC set to  0.000000
9/9/2011	3:53:36 PM	H2 MFC set to  0.000000
9/9/2011	3:53:36 PM	BCl3 MFC set to  0.000000
9/9/2011	3:53:36 PM	PHl3 MFC set to  0.000000
9/9/2011	3:53:36 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:53:36 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:53:36 PM	Tube furnace set to 0
9/9/2011	3:53:37 PM	Run finished at 3:53 PM
9/9/2011	3:53:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/9/2011	3:54:53 PM	Recipe started at 3:54 PM
9/9/2011	3:54:53 PM	Helium valve closed
9/9/2011	3:54:53 PM	H2 valve closed
9/9/2011	3:54:53 PM	BCl3 valve closed
9/9/2011	3:54:53 PM	PH3 valve closed
9/9/2011	3:54:53 PM	SiCl4 pre valve closed
9/9/2011	3:54:53 PM	SiCl4 post valve closed
9/9/2011	3:54:53 PM	Bypass valve closed
9/9/2011	3:54:53 PM	Bubbler valve closed
9/9/2011	3:54:53 PM	Main Vac valve opened
9/9/2011	3:54:53 PM	Helium MFC set to  0.000000
9/9/2011	3:54:53 PM	H2 MFC set to  0.000000
9/9/2011	3:54:53 PM	BCl3 MFC set to  0.000000
9/9/2011	3:54:53 PM	PHl3 MFC set to  0.000000
9/9/2011	3:54:53 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:54:53 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:54:53 PM	Tube furnace set to 0
9/9/2011	3:55:23 PM	H2 valve closed
9/9/2011	3:55:23 PM	BCl3 valve closed
9/9/2011	3:55:23 PM	PH3 valve closed
9/9/2011	3:55:23 PM	SiCl4 pre valve closed
9/9/2011	3:55:23 PM	SiCl4 post valve closed
9/9/2011	3:55:23 PM	Bypass valve closed
9/9/2011	3:55:23 PM	Bubbler valve closed
9/9/2011	3:55:23 PM	Helium valve opened
9/9/2011	3:55:23 PM	Main Vac valve opened
9/9/2011	3:55:23 PM	Helium MFC set to  20.000000
9/9/2011	3:55:23 PM	H2 MFC set to  0.000000
9/9/2011	3:55:23 PM	BCl3 MFC set to  0.000000
9/9/2011	3:55:23 PM	PHl3 MFC set to  0.000000
9/9/2011	3:55:23 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:55:23 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:55:23 PM	Tube furnace set to 0
9/9/2011	3:55:53 PM	Helium valve closed
9/9/2011	3:55:53 PM	H2 valve closed
9/9/2011	3:55:53 PM	BCl3 valve closed
9/9/2011	3:55:53 PM	PH3 valve closed
9/9/2011	3:55:53 PM	SiCl4 pre valve closed
9/9/2011	3:55:53 PM	SiCl4 post valve closed
9/9/2011	3:55:53 PM	Bypass valve closed
9/9/2011	3:55:53 PM	Bubbler valve closed
9/9/2011	3:55:53 PM	Main Vac valve opened
9/9/2011	3:55:53 PM	Helium MFC set to  0.000000
9/9/2011	3:55:53 PM	H2 MFC set to  0.000000
9/9/2011	3:55:53 PM	BCl3 MFC set to  0.000000
9/9/2011	3:55:53 PM	PHl3 MFC set to  0.000000
9/9/2011	3:55:53 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:55:53 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:55:53 PM	Tube furnace set to 0
9/9/2011	3:56:23 PM	H2 valve closed
9/9/2011	3:56:23 PM	BCl3 valve closed
9/9/2011	3:56:23 PM	PH3 valve closed
9/9/2011	3:56:23 PM	SiCl4 pre valve closed
9/9/2011	3:56:23 PM	SiCl4 post valve closed
9/9/2011	3:56:23 PM	Bypass valve closed
9/9/2011	3:56:23 PM	Bubbler valve closed
9/9/2011	3:56:23 PM	Helium valve opened
9/9/2011	3:56:23 PM	Main Vac valve opened
9/9/2011	3:56:23 PM	Helium MFC set to  20.000000
9/9/2011	3:56:23 PM	H2 MFC set to  0.000000
9/9/2011	3:56:23 PM	BCl3 MFC set to  0.000000
9/9/2011	3:56:23 PM	PHl3 MFC set to  0.000000
9/9/2011	3:56:23 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:56:23 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:56:23 PM	Tube furnace set to 0
9/9/2011	3:56:53 PM	Helium valve closed
9/9/2011	3:56:53 PM	H2 valve closed
9/9/2011	3:56:53 PM	BCl3 valve closed
9/9/2011	3:56:53 PM	PH3 valve closed
9/9/2011	3:56:53 PM	SiCl4 pre valve closed
9/9/2011	3:56:53 PM	SiCl4 post valve closed
9/9/2011	3:56:53 PM	Bypass valve closed
9/9/2011	3:56:53 PM	Bubbler valve closed
9/9/2011	3:56:53 PM	Main Vac valve opened
9/9/2011	3:56:53 PM	Helium MFC set to  0.000000
9/9/2011	3:56:53 PM	H2 MFC set to  0.000000
9/9/2011	3:56:53 PM	BCl3 MFC set to  0.000000
9/9/2011	3:56:53 PM	PHl3 MFC set to  0.000000
9/9/2011	3:56:53 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:56:53 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:56:54 PM	Tube furnace set to 0
9/9/2011	3:57:24 PM	H2 valve closed
9/9/2011	3:57:24 PM	BCl3 valve closed
9/9/2011	3:57:24 PM	PH3 valve closed
9/9/2011	3:57:24 PM	SiCl4 pre valve closed
9/9/2011	3:57:24 PM	SiCl4 post valve closed
9/9/2011	3:57:24 PM	Bypass valve closed
9/9/2011	3:57:24 PM	Bubbler valve closed
9/9/2011	3:57:24 PM	Helium valve opened
9/9/2011	3:57:24 PM	Main Vac valve opened
9/9/2011	3:57:24 PM	Helium MFC set to  20.000000
9/9/2011	3:57:24 PM	H2 MFC set to  0.000000
9/9/2011	3:57:24 PM	BCl3 MFC set to  0.000000
9/9/2011	3:57:24 PM	PHl3 MFC set to  0.000000
9/9/2011	3:57:24 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:57:24 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:57:24 PM	Tube furnace set to 0
9/9/2011	3:57:54 PM	Helium valve closed
9/9/2011	3:57:54 PM	H2 valve closed
9/9/2011	3:57:54 PM	BCl3 valve closed
9/9/2011	3:57:54 PM	PH3 valve closed
9/9/2011	3:57:54 PM	SiCl4 pre valve closed
9/9/2011	3:57:54 PM	SiCl4 post valve closed
9/9/2011	3:57:54 PM	Bypass valve closed
9/9/2011	3:57:54 PM	Bubbler valve closed
9/9/2011	3:57:54 PM	Main Vac valve opened
9/9/2011	3:57:54 PM	Helium MFC set to  0.000000
9/9/2011	3:57:54 PM	H2 MFC set to  0.000000
9/9/2011	3:57:54 PM	BCl3 MFC set to  0.000000
9/9/2011	3:57:54 PM	PHl3 MFC set to  0.000000
9/9/2011	3:57:54 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:57:54 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:57:54 PM	Tube furnace set to 0
9/9/2011	3:58:24 PM	H2 valve closed
9/9/2011	3:58:24 PM	BCl3 valve closed
9/9/2011	3:58:24 PM	PH3 valve closed
9/9/2011	3:58:24 PM	SiCl4 pre valve closed
9/9/2011	3:58:24 PM	SiCl4 post valve closed
9/9/2011	3:58:24 PM	Bypass valve closed
9/9/2011	3:58:24 PM	Bubbler valve closed
9/9/2011	3:58:24 PM	Helium valve opened
9/9/2011	3:58:24 PM	Main Vac valve opened
9/9/2011	3:58:24 PM	Helium MFC set to  20.000000
9/9/2011	3:58:24 PM	H2 MFC set to  0.000000
9/9/2011	3:58:24 PM	BCl3 MFC set to  0.000000
9/9/2011	3:58:24 PM	PHl3 MFC set to  0.000000
9/9/2011	3:58:24 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:58:24 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:58:24 PM	Tube furnace set to 0
9/9/2011	3:58:54 PM	Helium valve closed
9/9/2011	3:58:54 PM	H2 valve closed
9/9/2011	3:58:54 PM	BCl3 valve closed
9/9/2011	3:58:54 PM	PH3 valve closed
9/9/2011	3:58:54 PM	SiCl4 pre valve closed
9/9/2011	3:58:54 PM	SiCl4 post valve closed
9/9/2011	3:58:54 PM	Bypass valve closed
9/9/2011	3:58:54 PM	Bubbler valve closed
9/9/2011	3:58:54 PM	Main Vac valve opened
9/9/2011	3:58:54 PM	Helium MFC set to  0.000000
9/9/2011	3:58:54 PM	H2 MFC set to  0.000000
9/9/2011	3:58:54 PM	BCl3 MFC set to  0.000000
9/9/2011	3:58:54 PM	PHl3 MFC set to  0.000000
9/9/2011	3:58:54 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:58:54 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:58:54 PM	Tube furnace set to 0
9/9/2011	3:59:24 PM	H2 valve closed
9/9/2011	3:59:24 PM	BCl3 valve closed
9/9/2011	3:59:24 PM	PH3 valve closed
9/9/2011	3:59:24 PM	SiCl4 pre valve closed
9/9/2011	3:59:24 PM	SiCl4 post valve closed
9/9/2011	3:59:24 PM	Bypass valve closed
9/9/2011	3:59:24 PM	Bubbler valve closed
9/9/2011	3:59:24 PM	Helium valve opened
9/9/2011	3:59:24 PM	Main Vac valve opened
9/9/2011	3:59:24 PM	Helium MFC set to  20.000000
9/9/2011	3:59:24 PM	H2 MFC set to  0.000000
9/9/2011	3:59:24 PM	BCl3 MFC set to  0.000000
9/9/2011	3:59:24 PM	PHl3 MFC set to  0.000000
9/9/2011	3:59:24 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:59:24 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:59:25 PM	Tube furnace set to 0
9/9/2011	3:59:55 PM	Helium valve closed
9/9/2011	3:59:55 PM	H2 valve closed
9/9/2011	3:59:55 PM	BCl3 valve closed
9/9/2011	3:59:55 PM	PH3 valve closed
9/9/2011	3:59:55 PM	SiCl4 pre valve closed
9/9/2011	3:59:55 PM	SiCl4 post valve closed
9/9/2011	3:59:55 PM	Bypass valve closed
9/9/2011	3:59:55 PM	Bubbler valve closed
9/9/2011	3:59:55 PM	Main Vac valve opened
9/9/2011	3:59:55 PM	Helium MFC set to  0.000000
9/9/2011	3:59:55 PM	H2 MFC set to  0.000000
9/9/2011	3:59:55 PM	BCl3 MFC set to  0.000000
9/9/2011	3:59:55 PM	PHl3 MFC set to  0.000000
9/9/2011	3:59:55 PM	SiCl4 MFC set to  0.000000
9/9/2011	3:59:55 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	3:59:55 PM	Tube furnace set to 0
9/9/2011	4:00:25 PM	H2 valve closed
9/9/2011	4:00:25 PM	BCl3 valve closed
9/9/2011	4:00:25 PM	PH3 valve closed
9/9/2011	4:00:25 PM	SiCl4 pre valve closed
9/9/2011	4:00:25 PM	SiCl4 post valve closed
9/9/2011	4:00:25 PM	Bypass valve closed
9/9/2011	4:00:25 PM	Bubbler valve closed
9/9/2011	4:00:25 PM	Helium valve opened
9/9/2011	4:00:25 PM	Main Vac valve opened
9/9/2011	4:00:25 PM	Helium MFC set to  20.000000
9/9/2011	4:00:25 PM	H2 MFC set to  0.000000
9/9/2011	4:00:25 PM	BCl3 MFC set to  0.000000
9/9/2011	4:00:25 PM	PHl3 MFC set to  0.000000
9/9/2011	4:00:25 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:00:25 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:00:25 PM	Tube furnace set to 0
9/9/2011	4:00:55 PM	Helium valve closed
9/9/2011	4:00:55 PM	H2 valve closed
9/9/2011	4:00:55 PM	BCl3 valve closed
9/9/2011	4:00:55 PM	PH3 valve closed
9/9/2011	4:00:55 PM	SiCl4 pre valve closed
9/9/2011	4:00:55 PM	SiCl4 post valve closed
9/9/2011	4:00:55 PM	Bypass valve closed
9/9/2011	4:00:55 PM	Bubbler valve closed
9/9/2011	4:00:55 PM	Main Vac valve opened
9/9/2011	4:00:55 PM	Helium MFC set to  0.000000
9/9/2011	4:00:55 PM	H2 MFC set to  0.000000
9/9/2011	4:00:55 PM	BCl3 MFC set to  0.000000
9/9/2011	4:00:55 PM	PHl3 MFC set to  0.000000
9/9/2011	4:00:55 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:00:55 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:00:55 PM	Tube furnace set to 0
9/9/2011	4:01:25 PM	H2 valve closed
9/9/2011	4:01:25 PM	BCl3 valve closed
9/9/2011	4:01:25 PM	PH3 valve closed
9/9/2011	4:01:25 PM	SiCl4 pre valve closed
9/9/2011	4:01:25 PM	SiCl4 post valve closed
9/9/2011	4:01:25 PM	Bypass valve closed
9/9/2011	4:01:25 PM	Bubbler valve closed
9/9/2011	4:01:25 PM	Helium valve opened
9/9/2011	4:01:25 PM	Main Vac valve opened
9/9/2011	4:01:25 PM	Helium MFC set to  20.000000
9/9/2011	4:01:25 PM	H2 MFC set to  0.000000
9/9/2011	4:01:25 PM	BCl3 MFC set to  0.000000
9/9/2011	4:01:25 PM	PHl3 MFC set to  0.000000
9/9/2011	4:01:25 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:01:25 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:01:25 PM	Tube furnace set to 0
9/9/2011	4:01:55 PM	Helium valve closed
9/9/2011	4:01:55 PM	H2 valve closed
9/9/2011	4:01:55 PM	BCl3 valve closed
9/9/2011	4:01:55 PM	PH3 valve closed
9/9/2011	4:01:55 PM	SiCl4 pre valve closed
9/9/2011	4:01:55 PM	SiCl4 post valve closed
9/9/2011	4:01:55 PM	Bypass valve closed
9/9/2011	4:01:55 PM	Bubbler valve closed
9/9/2011	4:01:55 PM	Main Vac valve opened
9/9/2011	4:01:55 PM	Helium MFC set to  0.000000
9/9/2011	4:01:55 PM	H2 MFC set to  0.000000
9/9/2011	4:01:55 PM	BCl3 MFC set to  0.000000
9/9/2011	4:01:55 PM	PHl3 MFC set to  0.000000
9/9/2011	4:01:55 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:01:55 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:01:56 PM	Tube furnace set to 0
9/9/2011	4:02:26 PM	H2 valve closed
9/9/2011	4:02:26 PM	BCl3 valve closed
9/9/2011	4:02:26 PM	PH3 valve closed
9/9/2011	4:02:26 PM	SiCl4 pre valve closed
9/9/2011	4:02:26 PM	SiCl4 post valve closed
9/9/2011	4:02:26 PM	Bypass valve closed
9/9/2011	4:02:26 PM	Bubbler valve closed
9/9/2011	4:02:26 PM	Helium valve opened
9/9/2011	4:02:26 PM	Main Vac valve opened
9/9/2011	4:02:26 PM	Helium MFC set to  20.000000
9/9/2011	4:02:26 PM	H2 MFC set to  0.000000
9/9/2011	4:02:26 PM	BCl3 MFC set to  0.000000
9/9/2011	4:02:26 PM	PHl3 MFC set to  0.000000
9/9/2011	4:02:26 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:02:26 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:02:26 PM	Tube furnace set to 0
9/9/2011	4:02:56 PM	Helium valve closed
9/9/2011	4:02:56 PM	H2 valve closed
9/9/2011	4:02:56 PM	BCl3 valve closed
9/9/2011	4:02:56 PM	PH3 valve closed
9/9/2011	4:02:56 PM	SiCl4 pre valve closed
9/9/2011	4:02:56 PM	SiCl4 post valve closed
9/9/2011	4:02:56 PM	Bypass valve closed
9/9/2011	4:02:56 PM	Bubbler valve closed
9/9/2011	4:02:56 PM	Main Vac valve opened
9/9/2011	4:02:56 PM	Helium MFC set to  0.000000
9/9/2011	4:02:56 PM	H2 MFC set to  0.000000
9/9/2011	4:02:56 PM	BCl3 MFC set to  0.000000
9/9/2011	4:02:56 PM	PHl3 MFC set to  0.000000
9/9/2011	4:02:56 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:02:56 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:02:56 PM	Tube furnace set to 0
9/9/2011	4:03:26 PM	H2 valve closed
9/9/2011	4:03:26 PM	BCl3 valve closed
9/9/2011	4:03:26 PM	PH3 valve closed
9/9/2011	4:03:26 PM	SiCl4 pre valve closed
9/9/2011	4:03:26 PM	SiCl4 post valve closed
9/9/2011	4:03:26 PM	Bypass valve closed
9/9/2011	4:03:26 PM	Bubbler valve closed
9/9/2011	4:03:26 PM	Helium valve opened
9/9/2011	4:03:26 PM	Main Vac valve opened
9/9/2011	4:03:26 PM	Helium MFC set to  20.000000
9/9/2011	4:03:26 PM	H2 MFC set to  0.000000
9/9/2011	4:03:26 PM	BCl3 MFC set to  0.000000
9/9/2011	4:03:26 PM	PHl3 MFC set to  0.000000
9/9/2011	4:03:26 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:03:26 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:03:26 PM	Tube furnace set to 0
9/9/2011	4:03:56 PM	Helium valve closed
9/9/2011	4:03:56 PM	H2 valve closed
9/9/2011	4:03:56 PM	BCl3 valve closed
9/9/2011	4:03:56 PM	PH3 valve closed
9/9/2011	4:03:56 PM	SiCl4 pre valve closed
9/9/2011	4:03:56 PM	SiCl4 post valve closed
9/9/2011	4:03:56 PM	Bypass valve closed
9/9/2011	4:03:56 PM	Bubbler valve closed
9/9/2011	4:03:56 PM	Main Vac valve opened
9/9/2011	4:03:56 PM	Helium MFC set to  0.000000
9/9/2011	4:03:56 PM	H2 MFC set to  0.000000
9/9/2011	4:03:56 PM	BCl3 MFC set to  0.000000
9/9/2011	4:03:56 PM	PHl3 MFC set to  0.000000
9/9/2011	4:03:56 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:03:56 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:03:56 PM	Tube furnace set to 0
9/9/2011	4:04:26 PM	H2 valve closed
9/9/2011	4:04:26 PM	BCl3 valve closed
9/9/2011	4:04:26 PM	PH3 valve closed
9/9/2011	4:04:26 PM	SiCl4 pre valve closed
9/9/2011	4:04:26 PM	SiCl4 post valve closed
9/9/2011	4:04:26 PM	Bypass valve closed
9/9/2011	4:04:26 PM	Bubbler valve closed
9/9/2011	4:04:26 PM	Helium valve opened
9/9/2011	4:04:26 PM	Main Vac valve opened
9/9/2011	4:04:26 PM	Helium MFC set to  20.000000
9/9/2011	4:04:26 PM	H2 MFC set to  0.000000
9/9/2011	4:04:26 PM	BCl3 MFC set to  0.000000
9/9/2011	4:04:26 PM	PHl3 MFC set to  0.000000
9/9/2011	4:04:26 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:04:26 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:04:27 PM	Tube furnace set to 0
9/9/2011	4:04:57 PM	Helium valve closed
9/9/2011	4:04:57 PM	H2 valve closed
9/9/2011	4:04:57 PM	BCl3 valve closed
9/9/2011	4:04:57 PM	PH3 valve closed
9/9/2011	4:04:57 PM	SiCl4 pre valve closed
9/9/2011	4:04:57 PM	SiCl4 post valve closed
9/9/2011	4:04:57 PM	Bypass valve closed
9/9/2011	4:04:57 PM	Bubbler valve closed
9/9/2011	4:04:57 PM	Main Vac valve opened
9/9/2011	4:04:57 PM	Helium MFC set to  0.000000
9/9/2011	4:04:57 PM	H2 MFC set to  0.000000
9/9/2011	4:04:57 PM	BCl3 MFC set to  0.000000
9/9/2011	4:04:57 PM	PHl3 MFC set to  0.000000
9/9/2011	4:04:57 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:04:57 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:04:57 PM	Tube furnace set to 0
9/9/2011	4:04:58 PM	Run finished at 4:04 PM
9/9/2011	4:17:13 PM	Main Vac valve closed
9/9/2011	4:17:19 PM	Main Vac valve opened
9/9/2011	4:18:33 PM	Recipe started at 4:18 PM
9/9/2011	4:18:33 PM	Helium valve closed
9/9/2011	4:18:33 PM	H2 valve closed
9/9/2011	4:18:33 PM	BCl3 valve closed
9/9/2011	4:18:33 PM	PH3 valve closed
9/9/2011	4:18:33 PM	SiCl4 pre valve closed
9/9/2011	4:18:33 PM	SiCl4 post valve closed
9/9/2011	4:18:33 PM	Bypass valve closed
9/9/2011	4:18:33 PM	Bubbler valve closed
9/9/2011	4:18:33 PM	Main Vac valve opened
9/9/2011	4:18:33 PM	Helium MFC set to  0.000000
9/9/2011	4:18:33 PM	H2 MFC set to  0.000000
9/9/2011	4:18:33 PM	BCl3 MFC set to  0.000000
9/9/2011	4:18:33 PM	PHl3 MFC set to  0.000000
9/9/2011	4:18:33 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:18:33 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:18:33 PM	Tube furnace set to 180
9/9/2011	4:38:33 PM	Helium valve closed
9/9/2011	4:38:33 PM	BCl3 valve closed
9/9/2011	4:38:33 PM	PH3 valve closed
9/9/2011	4:38:33 PM	SiCl4 pre valve closed
9/9/2011	4:38:33 PM	SiCl4 post valve closed
9/9/2011	4:38:33 PM	Main Vac valve closed
9/9/2011	4:38:33 PM	Bypass valve closed
9/9/2011	4:38:33 PM	Bubbler valve closed
9/9/2011	4:38:33 PM	H2 valve opened
9/9/2011	4:38:33 PM	Helium MFC set to  0.000000
9/9/2011	4:38:33 PM	H2 MFC set to  500.000000
9/9/2011	4:38:33 PM	BCl3 MFC set to  0.000000
9/9/2011	4:38:33 PM	PHl3 MFC set to  0.000000
9/9/2011	4:38:33 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:38:33 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:38:33 PM	Tube furnace set to 1000
9/9/2011	4:39:36 PM	Helium valve closed
9/9/2011	4:39:36 PM	BCl3 valve closed
9/9/2011	4:39:36 PM	PH3 valve closed
9/9/2011	4:39:36 PM	SiCl4 pre valve closed
9/9/2011	4:39:36 PM	SiCl4 post valve closed
9/9/2011	4:39:36 PM	Main Vac valve closed
9/9/2011	4:39:36 PM	Bypass valve closed
9/9/2011	4:39:36 PM	H2 valve opened
9/9/2011	4:39:36 PM	Bubbler valve opened
9/9/2011	4:39:36 PM	Helium MFC set to  0.000000
9/9/2011	4:39:36 PM	H2 MFC set to  500.000000
9/9/2011	4:39:36 PM	BCl3 MFC set to  0.000000
9/9/2011	4:39:36 PM	PHl3 MFC set to  0.000000
9/9/2011	4:39:36 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:39:36 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:39:36 PM	Tube furnace set to 1000
9/9/2011	4:39:37 PM	Helium valve closed
9/9/2011	4:39:37 PM	BCl3 valve closed
9/9/2011	4:39:37 PM	PH3 valve closed
9/9/2011	4:39:37 PM	SiCl4 pre valve closed
9/9/2011	4:39:37 PM	SiCl4 post valve closed
9/9/2011	4:39:37 PM	Main Vac valve closed
9/9/2011	4:39:37 PM	Bypass valve closed
9/9/2011	4:39:37 PM	H2 valve opened
9/9/2011	4:39:37 PM	Bubbler valve opened
9/9/2011	4:39:37 PM	Helium MFC set to  0.000000
9/9/2011	4:39:37 PM	H2 MFC set to  500.000000
9/9/2011	4:39:37 PM	BCl3 MFC set to  0.000000
9/9/2011	4:39:37 PM	PHl3 MFC set to  0.000000
9/9/2011	4:39:37 PM	SiCl4 MFC set to  0.000000
9/9/2011	4:39:37 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:39:38 PM	Tube furnace set to 1000
9/9/2011	4:59:38 PM	Helium valve closed
9/9/2011	4:59:38 PM	PH3 valve closed
9/9/2011	4:59:38 PM	Main Vac valve closed
9/9/2011	4:59:38 PM	Bypass valve closed
9/9/2011	4:59:38 PM	H2 valve opened
9/9/2011	4:59:38 PM	BCl3 valve opened
9/9/2011	4:59:38 PM	SiCl4 pre valve opened
9/9/2011	4:59:38 PM	SiCl4 post valve opened
9/9/2011	4:59:38 PM	Bubbler valve opened
9/9/2011	4:59:38 PM	Helium MFC set to  0.000000
9/9/2011	4:59:38 PM	H2 MFC set to  500.000000
9/9/2011	4:59:38 PM	BCl3 MFC set to  2.500000
9/9/2011	4:59:38 PM	PHl3 MFC set to  0.000000
9/9/2011	4:59:38 PM	SiCl4 MFC set to  50.000000
9/9/2011	4:59:38 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	4:59:38 PM	Tube furnace set to 1000
9/9/2011	5:11:38 PM	Helium valve closed
9/9/2011	5:11:38 PM	BCl3 valve closed
9/9/2011	5:11:38 PM	PH3 valve closed
9/9/2011	5:11:38 PM	SiCl4 pre valve closed
9/9/2011	5:11:38 PM	SiCl4 post valve closed
9/9/2011	5:11:38 PM	Main Vac valve closed
9/9/2011	5:11:38 PM	Bypass valve closed
9/9/2011	5:11:38 PM	H2 valve opened
9/9/2011	5:11:38 PM	Bubbler valve opened
9/9/2011	5:11:38 PM	Helium MFC set to  0.000000
9/9/2011	5:11:38 PM	H2 MFC set to  500.000000
9/9/2011	5:11:38 PM	BCl3 MFC set to  0.000000
9/9/2011	5:11:38 PM	PHl3 MFC set to  0.000000
9/9/2011	5:11:38 PM	SiCl4 MFC set to  0.000000
9/9/2011	5:11:38 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	5:11:38 PM	Tube furnace set to 750
9/9/2011	5:16:38 PM	H2 valve closed
9/9/2011	5:16:38 PM	BCl3 valve closed
9/9/2011	5:16:38 PM	PH3 valve closed
9/9/2011	5:16:38 PM	SiCl4 pre valve closed
9/9/2011	5:16:38 PM	SiCl4 post valve closed
9/9/2011	5:16:38 PM	Main Vac valve closed
9/9/2011	5:16:38 PM	Bypass valve closed
9/9/2011	5:16:38 PM	Helium valve opened
9/9/2011	5:16:38 PM	Bubbler valve opened
9/9/2011	5:16:38 PM	Helium MFC set to  500.000000
9/9/2011	5:16:38 PM	H2 MFC set to  0.000000
9/9/2011	5:16:38 PM	BCl3 MFC set to  0.000000
9/9/2011	5:16:38 PM	PHl3 MFC set to  0.000000
9/9/2011	5:16:38 PM	SiCl4 MFC set to  0.000000
9/9/2011	5:16:38 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	5:16:38 PM	Tube furnace set to 0
9/9/2011	5:36:38 PM	Helium valve closed
9/9/2011	5:36:38 PM	H2 valve closed
9/9/2011	5:36:38 PM	BCl3 valve closed
9/9/2011	5:36:38 PM	PH3 valve closed
9/9/2011	5:36:38 PM	SiCl4 pre valve closed
9/9/2011	5:36:38 PM	SiCl4 post valve closed
9/9/2011	5:36:38 PM	Main Vac valve closed
9/9/2011	5:36:38 PM	Bypass valve closed
9/9/2011	5:36:38 PM	Bubbler valve closed
9/9/2011	5:36:38 PM	Helium MFC set to  0.000000
9/9/2011	5:36:38 PM	H2 MFC set to  0.000000
9/9/2011	5:36:38 PM	BCl3 MFC set to  0.000000
9/9/2011	5:36:38 PM	PHl3 MFC set to  0.000000
9/9/2011	5:36:38 PM	SiCl4 MFC set to  0.000000
9/9/2011	5:36:38 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	5:36:38 PM	Tube furnace set to 0
9/9/2011	6:36:38 PM	H2 valve closed
9/9/2011	6:36:38 PM	BCl3 valve closed
9/9/2011	6:36:38 PM	PH3 valve closed
9/9/2011	6:36:38 PM	SiCl4 pre valve closed
9/9/2011	6:36:38 PM	SiCl4 post valve closed
9/9/2011	6:36:38 PM	Main Vac valve closed
9/9/2011	6:36:38 PM	Bypass valve closed
9/9/2011	6:36:38 PM	Bubbler valve closed
9/9/2011	6:36:38 PM	Helium valve opened
9/9/2011	6:36:38 PM	Helium MFC set to  500.000000
9/9/2011	6:36:38 PM	H2 MFC set to  0.000000
9/9/2011	6:36:38 PM	BCl3 MFC set to  0.000000
9/9/2011	6:36:38 PM	PHl3 MFC set to  0.000000
9/9/2011	6:36:38 PM	SiCl4 MFC set to  0.000000
9/9/2011	6:36:38 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	6:36:38 PM	Tube furnace set to 0
9/9/2011	6:36:44 PM	H2 valve closed
9/9/2011	6:36:44 PM	BCl3 valve closed
9/9/2011	6:36:44 PM	PH3 valve closed
9/9/2011	6:36:44 PM	SiCl4 pre valve closed
9/9/2011	6:36:44 PM	SiCl4 post valve closed
9/9/2011	6:36:44 PM	Main Vac valve closed
9/9/2011	6:36:44 PM	Bypass valve closed
9/9/2011	6:36:44 PM	Helium valve opened
9/9/2011	6:36:44 PM	Bubbler valve opened
9/9/2011	6:36:44 PM	Helium MFC set to  500.000000
9/9/2011	6:36:44 PM	H2 MFC set to  0.000000
9/9/2011	6:36:44 PM	BCl3 MFC set to  0.000000
9/9/2011	6:36:44 PM	PHl3 MFC set to  0.000000
9/9/2011	6:36:44 PM	SiCl4 MFC set to  0.000000
9/9/2011	6:36:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	6:36:44 PM	Tube furnace set to 0
9/9/2011	6:41:44 PM	Helium valve closed
9/9/2011	6:41:44 PM	H2 valve closed
9/9/2011	6:41:44 PM	BCl3 valve closed
9/9/2011	6:41:44 PM	PH3 valve closed
9/9/2011	6:41:44 PM	SiCl4 pre valve closed
9/9/2011	6:41:44 PM	SiCl4 post valve closed
9/9/2011	6:41:44 PM	Main Vac valve closed
9/9/2011	6:41:44 PM	Bypass valve closed
9/9/2011	6:41:44 PM	Bubbler valve closed
9/9/2011	6:41:44 PM	Helium MFC set to  0.000000
9/9/2011	6:41:44 PM	H2 MFC set to  0.000000
9/9/2011	6:41:44 PM	BCl3 MFC set to  0.000000
9/9/2011	6:41:44 PM	PHl3 MFC set to  0.000000
9/9/2011	6:41:44 PM	SiCl4 MFC set to  0.000000
9/9/2011	6:41:44 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	6:41:45 PM	Tube furnace set to 0
9/9/2011	6:41:46 PM	Helium valve closed
9/9/2011	6:41:46 PM	H2 valve closed
9/9/2011	6:41:46 PM	BCl3 valve closed
9/9/2011	6:41:46 PM	PH3 valve closed
9/9/2011	6:41:46 PM	SiCl4 pre valve closed
9/9/2011	6:41:46 PM	SiCl4 post valve closed
9/9/2011	6:41:46 PM	Main Vac valve closed
9/9/2011	6:41:46 PM	Bubbler valve closed
9/9/2011	6:41:46 PM	Bypass valve opened
9/9/2011	6:41:46 PM	Helium MFC set to  0.000000
9/9/2011	6:41:46 PM	H2 MFC set to  0.000000
9/9/2011	6:41:46 PM	BCl3 MFC set to  0.000000
9/9/2011	6:41:46 PM	PHl3 MFC set to  0.000000
9/9/2011	6:41:46 PM	SiCl4 MFC set to  0.000000
9/9/2011	6:41:46 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	6:41:46 PM	Tube furnace set to 0
9/9/2011	6:42:35 PM	Helium valve closed
9/9/2011	6:42:35 PM	H2 valve closed
9/9/2011	6:42:35 PM	BCl3 valve closed
9/9/2011	6:42:35 PM	PH3 valve closed
9/9/2011	6:42:35 PM	SiCl4 pre valve closed
9/9/2011	6:42:35 PM	SiCl4 post valve closed
9/9/2011	6:42:35 PM	Main Vac valve closed
9/9/2011	6:42:35 PM	Bubbler valve closed
9/9/2011	6:42:35 PM	Bypass valve opened
9/9/2011	6:42:35 PM	Helium MFC set to  0.000000
9/9/2011	6:42:35 PM	H2 MFC set to  0.000000
9/9/2011	6:42:35 PM	BCl3 MFC set to  0.000000
9/9/2011	6:42:35 PM	PHl3 MFC set to  0.000000
9/9/2011	6:42:35 PM	SiCl4 MFC set to  0.000000
9/9/2011	6:42:35 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	6:42:35 PM	Tube furnace set to 0
9/9/2011	6:43:35 PM	Helium valve closed
9/9/2011	6:43:35 PM	H2 valve closed
9/9/2011	6:43:35 PM	BCl3 valve closed
9/9/2011	6:43:35 PM	PH3 valve closed
9/9/2011	6:43:35 PM	SiCl4 pre valve closed
9/9/2011	6:43:35 PM	SiCl4 post valve closed
9/9/2011	6:43:35 PM	Bypass valve closed
9/9/2011	6:43:35 PM	Bubbler valve closed
9/9/2011	6:43:35 PM	Main Vac valve opened
9/9/2011	6:43:35 PM	Helium MFC set to  0.000000
9/9/2011	6:43:35 PM	H2 MFC set to  0.000000
9/9/2011	6:43:35 PM	BCl3 MFC set to  0.000000
9/9/2011	6:43:35 PM	PHl3 MFC set to  0.000000
9/9/2011	6:43:35 PM	SiCl4 MFC set to  0.000000
9/9/2011	6:43:35 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	6:43:35 PM	Tube furnace set to 0
9/9/2011	6:43:36 PM	Run finished at 6:43 PM
9/9/2011	8:16:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2011	8:16:20 PM	Recipe started at 8:16 PM
9/9/2011	8:16:20 PM	Helium valve closed
9/9/2011	8:16:20 PM	H2 valve closed
9/9/2011	8:16:20 PM	BCl3 valve closed
9/9/2011	8:16:20 PM	PH3 valve closed
9/9/2011	8:16:20 PM	SiCl4 pre valve closed
9/9/2011	8:16:20 PM	SiCl4 post valve closed
9/9/2011	8:16:20 PM	Main Vac valve closed
9/9/2011	8:16:20 PM	Bypass valve closed
9/9/2011	8:16:20 PM	Bubbler valve closed
9/9/2011	8:16:20 PM	Helium MFC set to  0.000000
9/9/2011	8:16:20 PM	H2 MFC set to  0.000000
9/9/2011	8:16:20 PM	BCl3 MFC set to  0.000000
9/9/2011	8:16:20 PM	PHl3 MFC set to  0.000000
9/9/2011	8:16:20 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:16:20 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:16:20 PM	Tube furnace set to 0
9/9/2011	8:16:23 PM	H2 valve closed
9/9/2011	8:16:23 PM	BCl3 valve closed
9/9/2011	8:16:23 PM	PH3 valve closed
9/9/2011	8:16:23 PM	SiCl4 pre valve closed
9/9/2011	8:16:23 PM	SiCl4 post valve closed
9/9/2011	8:16:23 PM	Main Vac valve closed
9/9/2011	8:16:23 PM	Bypass valve closed
9/9/2011	8:16:23 PM	Bubbler valve closed
9/9/2011	8:16:23 PM	Helium valve opened
9/9/2011	8:16:23 PM	Helium MFC set to  500.000000
9/9/2011	8:16:23 PM	H2 MFC set to  0.000000
9/9/2011	8:16:23 PM	BCl3 MFC set to  0.000000
9/9/2011	8:16:23 PM	PHl3 MFC set to  0.000000
9/9/2011	8:16:23 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:16:23 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:16:23 PM	Tube furnace set to 0
9/9/2011	8:17:26 PM	Helium valve closed
9/9/2011	8:17:26 PM	H2 valve closed
9/9/2011	8:17:26 PM	BCl3 valve closed
9/9/2011	8:17:26 PM	PH3 valve closed
9/9/2011	8:17:26 PM	SiCl4 pre valve closed
9/9/2011	8:17:26 PM	SiCl4 post valve closed
9/9/2011	8:17:26 PM	Main Vac valve closed
9/9/2011	8:17:26 PM	Bypass valve closed
9/9/2011	8:17:26 PM	Bubbler valve closed
9/9/2011	8:17:26 PM	Helium MFC set to  0.000000
9/9/2011	8:17:26 PM	H2 MFC set to  0.000000
9/9/2011	8:17:26 PM	BCl3 MFC set to  0.000000
9/9/2011	8:17:26 PM	PHl3 MFC set to  0.000000
9/9/2011	8:17:26 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:17:26 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:17:26 PM	Tube furnace set to 0
9/9/2011	8:17:27 PM	Run finished at 8:17 PM
9/9/2011	8:17:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/9/2011	8:20:55 PM	Helium MFC set to  500.000000
9/9/2011	8:20:58 PM	Helium valve opened
9/9/2011	8:21:02 PM	Bubbler valve opened
9/9/2011	8:23:16 PM	Bubbler valve closed
9/9/2011	8:23:17 PM	Helium valve closed
9/9/2011	8:23:20 PM	Helium MFC set to  0.000000
9/9/2011	8:23:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/9/2011	8:23:40 PM	Recipe started at 8:23 PM
9/9/2011	8:23:40 PM	Helium valve closed
9/9/2011	8:23:40 PM	H2 valve closed
9/9/2011	8:23:40 PM	BCl3 valve closed
9/9/2011	8:23:40 PM	PH3 valve closed
9/9/2011	8:23:40 PM	SiCl4 pre valve closed
9/9/2011	8:23:40 PM	SiCl4 post valve closed
9/9/2011	8:23:40 PM	Main Vac valve closed
9/9/2011	8:23:40 PM	Bubbler valve closed
9/9/2011	8:23:40 PM	Bypass valve opened
9/9/2011	8:23:40 PM	Helium MFC set to  0.000000
9/9/2011	8:23:40 PM	H2 MFC set to  0.000000
9/9/2011	8:23:40 PM	BCl3 MFC set to  0.000000
9/9/2011	8:23:40 PM	PHl3 MFC set to  0.000000
9/9/2011	8:23:40 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:23:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:23:41 PM	Tube furnace set to 0
9/9/2011	8:24:39 PM	Helium valve closed
9/9/2011	8:24:39 PM	H2 valve closed
9/9/2011	8:24:39 PM	BCl3 valve closed
9/9/2011	8:24:39 PM	PH3 valve closed
9/9/2011	8:24:39 PM	SiCl4 pre valve closed
9/9/2011	8:24:39 PM	SiCl4 post valve closed
9/9/2011	8:24:39 PM	Main Vac valve closed
9/9/2011	8:24:39 PM	Bubbler valve closed
9/9/2011	8:24:39 PM	Bypass valve opened
9/9/2011	8:24:39 PM	Helium MFC set to  0.000000
9/9/2011	8:24:39 PM	H2 MFC set to  0.000000
9/9/2011	8:24:39 PM	BCl3 MFC set to  0.000000
9/9/2011	8:24:39 PM	PHl3 MFC set to  0.000000
9/9/2011	8:24:39 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:24:39 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:24:40 PM	Tube furnace set to 0
9/9/2011	8:25:10 PM	Helium valve closed
9/9/2011	8:25:10 PM	H2 valve closed
9/9/2011	8:25:10 PM	BCl3 valve closed
9/9/2011	8:25:10 PM	PH3 valve closed
9/9/2011	8:25:10 PM	SiCl4 pre valve closed
9/9/2011	8:25:10 PM	SiCl4 post valve closed
9/9/2011	8:25:10 PM	Bypass valve closed
9/9/2011	8:25:10 PM	Bubbler valve closed
9/9/2011	8:25:10 PM	Main Vac valve opened
9/9/2011	8:25:10 PM	Helium MFC set to  0.000000
9/9/2011	8:25:10 PM	H2 MFC set to  0.000000
9/9/2011	8:25:10 PM	BCl3 MFC set to  0.000000
9/9/2011	8:25:10 PM	PHl3 MFC set to  0.000000
9/9/2011	8:25:10 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:25:10 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:25:10 PM	Tube furnace set to 0
9/9/2011	8:25:40 PM	H2 valve closed
9/9/2011	8:25:40 PM	BCl3 valve closed
9/9/2011	8:25:40 PM	PH3 valve closed
9/9/2011	8:25:40 PM	SiCl4 pre valve closed
9/9/2011	8:25:40 PM	SiCl4 post valve closed
9/9/2011	8:25:40 PM	Bypass valve closed
9/9/2011	8:25:40 PM	Bubbler valve closed
9/9/2011	8:25:40 PM	Helium valve opened
9/9/2011	8:25:40 PM	Main Vac valve opened
9/9/2011	8:25:40 PM	Helium MFC set to  20.000000
9/9/2011	8:25:40 PM	H2 MFC set to  0.000000
9/9/2011	8:25:40 PM	BCl3 MFC set to  0.000000
9/9/2011	8:25:40 PM	PHl3 MFC set to  0.000000
9/9/2011	8:25:40 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:25:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:25:40 PM	Tube furnace set to 0
9/9/2011	8:26:10 PM	Helium valve closed
9/9/2011	8:26:10 PM	H2 valve closed
9/9/2011	8:26:10 PM	BCl3 valve closed
9/9/2011	8:26:10 PM	PH3 valve closed
9/9/2011	8:26:10 PM	SiCl4 pre valve closed
9/9/2011	8:26:10 PM	SiCl4 post valve closed
9/9/2011	8:26:10 PM	Bypass valve closed
9/9/2011	8:26:10 PM	Bubbler valve closed
9/9/2011	8:26:10 PM	Main Vac valve opened
9/9/2011	8:26:10 PM	Helium MFC set to  0.000000
9/9/2011	8:26:10 PM	H2 MFC set to  0.000000
9/9/2011	8:26:10 PM	BCl3 MFC set to  0.000000
9/9/2011	8:26:10 PM	PHl3 MFC set to  0.000000
9/9/2011	8:26:10 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:26:10 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:26:10 PM	Tube furnace set to 0
9/9/2011	8:26:40 PM	H2 valve closed
9/9/2011	8:26:40 PM	BCl3 valve closed
9/9/2011	8:26:40 PM	PH3 valve closed
9/9/2011	8:26:40 PM	SiCl4 pre valve closed
9/9/2011	8:26:40 PM	SiCl4 post valve closed
9/9/2011	8:26:40 PM	Bypass valve closed
9/9/2011	8:26:40 PM	Bubbler valve closed
9/9/2011	8:26:40 PM	Helium valve opened
9/9/2011	8:26:40 PM	Main Vac valve opened
9/9/2011	8:26:40 PM	Helium MFC set to  20.000000
9/9/2011	8:26:40 PM	H2 MFC set to  0.000000
9/9/2011	8:26:40 PM	BCl3 MFC set to  0.000000
9/9/2011	8:26:40 PM	PHl3 MFC set to  0.000000
9/9/2011	8:26:40 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:26:40 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:26:40 PM	Tube furnace set to 0
9/9/2011	8:27:10 PM	Helium valve closed
9/9/2011	8:27:10 PM	H2 valve closed
9/9/2011	8:27:10 PM	BCl3 valve closed
9/9/2011	8:27:10 PM	PH3 valve closed
9/9/2011	8:27:10 PM	SiCl4 pre valve closed
9/9/2011	8:27:10 PM	SiCl4 post valve closed
9/9/2011	8:27:10 PM	Bypass valve closed
9/9/2011	8:27:10 PM	Bubbler valve closed
9/9/2011	8:27:10 PM	Main Vac valve opened
9/9/2011	8:27:10 PM	Helium MFC set to  0.000000
9/9/2011	8:27:10 PM	H2 MFC set to  0.000000
9/9/2011	8:27:10 PM	BCl3 MFC set to  0.000000
9/9/2011	8:27:10 PM	PHl3 MFC set to  0.000000
9/9/2011	8:27:10 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:27:10 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:27:11 PM	Tube furnace set to 0
9/9/2011	8:27:37 PM	Run aborted at 8:27 PM
9/9/2011	8:27:37 PM	Helium valve closed
9/9/2011	8:27:37 PM	H2 valve closed
9/9/2011	8:27:37 PM	BCl3 valve closed
9/9/2011	8:27:37 PM	PH3 valve closed
9/9/2011	8:27:37 PM	SiCl4 pre valve closed
9/9/2011	8:27:37 PM	SiCl4 post valve closed
9/9/2011	8:27:37 PM	Bypass valve closed
9/9/2011	8:27:37 PM	Main Vac valve closed
9/9/2011	8:27:37 PM	Bubbler valve closed
9/9/2011	8:27:37 PM	Helium MFC set to  0.000000
9/9/2011	8:27:37 PM	H2 MFC set to  0.000000
9/9/2011	8:27:37 PM	BCl3 MFC set to  0.000000
9/9/2011	8:27:37 PM	PHl3 MFC set to  0.000000
9/9/2011	8:27:37 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:27:37 PM	Tube furnace set to 0
9/9/2011	8:27:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/9/2011	8:27:40 PM	Main Vac valve opened
9/9/2011	8:32:24 PM	Recipe started at 8:32 PM
9/9/2011	8:32:24 PM	Helium valve closed
9/9/2011	8:32:24 PM	H2 valve closed
9/9/2011	8:32:24 PM	BCl3 valve closed
9/9/2011	8:32:24 PM	PH3 valve closed
9/9/2011	8:32:24 PM	SiCl4 pre valve closed
9/9/2011	8:32:24 PM	SiCl4 post valve closed
9/9/2011	8:32:24 PM	Bypass valve closed
9/9/2011	8:32:24 PM	Bubbler valve closed
9/9/2011	8:32:24 PM	Main Vac valve opened
9/9/2011	8:32:24 PM	Helium MFC set to  0.000000
9/9/2011	8:32:24 PM	H2 MFC set to  0.000000
9/9/2011	8:32:24 PM	BCl3 MFC set to  0.000000
9/9/2011	8:32:24 PM	PHl3 MFC set to  0.000000
9/9/2011	8:32:24 PM	SiCl4 MFC set to  0.000000
9/9/2011	8:32:24 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	8:32:24 PM	Tube furnace set to 180
9/9/2011	9:02:24 PM	H2 valve closed
9/9/2011	9:02:24 PM	BCl3 valve closed
9/9/2011	9:02:24 PM	PH3 valve closed
9/9/2011	9:02:24 PM	SiCl4 pre valve closed
9/9/2011	9:02:24 PM	SiCl4 post valve closed
9/9/2011	9:02:24 PM	Bypass valve closed
9/9/2011	9:02:24 PM	Bubbler valve closed
9/9/2011	9:02:24 PM	Helium valve opened
9/9/2011	9:02:24 PM	Main Vac valve opened
9/9/2011	9:02:24 PM	Helium MFC set to  10.000000
9/9/2011	9:02:24 PM	H2 MFC set to  0.000000
9/9/2011	9:02:24 PM	BCl3 MFC set to  0.000000
9/9/2011	9:02:24 PM	PHl3 MFC set to  0.000000
9/9/2011	9:02:24 PM	SiCl4 MFC set to  0.000000
9/9/2011	9:02:24 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:02:24 PM	Tube furnace set to 180
9/9/2011	9:02:54 PM	Helium valve closed
9/9/2011	9:02:54 PM	H2 valve closed
9/9/2011	9:02:54 PM	BCl3 valve closed
9/9/2011	9:02:54 PM	PH3 valve closed
9/9/2011	9:02:54 PM	SiCl4 pre valve closed
9/9/2011	9:02:54 PM	SiCl4 post valve closed
9/9/2011	9:02:54 PM	Bypass valve closed
9/9/2011	9:02:54 PM	Bubbler valve closed
9/9/2011	9:02:54 PM	Main Vac valve opened
9/9/2011	9:02:54 PM	Helium MFC set to  0.000000
9/9/2011	9:02:54 PM	H2 MFC set to  0.000000
9/9/2011	9:02:54 PM	BCl3 MFC set to  0.000000
9/9/2011	9:02:54 PM	PHl3 MFC set to  0.000000
9/9/2011	9:02:54 PM	SiCl4 MFC set to  0.000000
9/9/2011	9:02:54 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:02:54 PM	Tube furnace set to 180
9/9/2011	9:03:24 PM	H2 valve closed
9/9/2011	9:03:24 PM	BCl3 valve closed
9/9/2011	9:03:24 PM	PH3 valve closed
9/9/2011	9:03:24 PM	SiCl4 pre valve closed
9/9/2011	9:03:24 PM	SiCl4 post valve closed
9/9/2011	9:03:24 PM	Bypass valve closed
9/9/2011	9:03:24 PM	Bubbler valve closed
9/9/2011	9:03:24 PM	Helium valve opened
9/9/2011	9:03:24 PM	Main Vac valve opened
9/9/2011	9:03:24 PM	Helium MFC set to  10.000000
9/9/2011	9:03:24 PM	H2 MFC set to  0.000000
9/9/2011	9:03:24 PM	BCl3 MFC set to  0.000000
9/9/2011	9:03:24 PM	PHl3 MFC set to  0.000000
9/9/2011	9:03:24 PM	SiCl4 MFC set to  0.000000
9/9/2011	9:03:24 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:03:24 PM	Tube furnace set to 180
9/9/2011	9:03:54 PM	Helium valve closed
9/9/2011	9:03:54 PM	H2 valve closed
9/9/2011	9:03:55 PM	BCl3 valve closed
9/9/2011	9:03:55 PM	PH3 valve closed
9/9/2011	9:03:55 PM	SiCl4 pre valve closed
9/9/2011	9:03:55 PM	SiCl4 post valve closed
9/9/2011	9:03:55 PM	Bypass valve closed
9/9/2011	9:03:55 PM	Bubbler valve closed
9/9/2011	9:03:55 PM	Main Vac valve opened
9/9/2011	9:03:55 PM	Helium MFC set to  0.000000
9/9/2011	9:03:55 PM	H2 MFC set to  0.000000
9/9/2011	9:03:55 PM	BCl3 MFC set to  0.000000
9/9/2011	9:03:55 PM	PHl3 MFC set to  0.000000
9/9/2011	9:03:55 PM	SiCl4 MFC set to  0.000000
9/9/2011	9:03:55 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:03:55 PM	Tube furnace set to 180
9/9/2011	9:04:55 PM	Helium valve closed
9/9/2011	9:04:55 PM	BCl3 valve closed
9/9/2011	9:04:55 PM	PH3 valve closed
9/9/2011	9:04:55 PM	SiCl4 pre valve closed
9/9/2011	9:04:55 PM	SiCl4 post valve closed
9/9/2011	9:04:55 PM	Main Vac valve closed
9/9/2011	9:04:55 PM	Bypass valve closed
9/9/2011	9:04:55 PM	Bubbler valve closed
9/9/2011	9:04:55 PM	H2 valve opened
9/9/2011	9:04:55 PM	Helium MFC set to  0.000000
9/9/2011	9:04:55 PM	H2 MFC set to  500.000000
9/9/2011	9:04:55 PM	BCl3 MFC set to  0.000000
9/9/2011	9:04:55 PM	PHl3 MFC set to  0.000000
9/9/2011	9:04:55 PM	SiCl4 MFC set to  0.000000
9/9/2011	9:04:55 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:04:55 PM	Tube furnace set to 1000
9/9/2011	9:05:58 PM	Helium valve closed
9/9/2011	9:05:58 PM	BCl3 valve closed
9/9/2011	9:05:58 PM	PH3 valve closed
9/9/2011	9:05:58 PM	SiCl4 pre valve closed
9/9/2011	9:05:58 PM	SiCl4 post valve closed
9/9/2011	9:05:58 PM	Main Vac valve closed
9/9/2011	9:05:58 PM	Bypass valve closed
9/9/2011	9:05:58 PM	H2 valve opened
9/9/2011	9:05:58 PM	Bubbler valve opened
9/9/2011	9:05:58 PM	Helium MFC set to  0.000000
9/9/2011	9:05:58 PM	H2 MFC set to  500.000000
9/9/2011	9:05:58 PM	BCl3 MFC set to  0.000000
9/9/2011	9:05:58 PM	PHl3 MFC set to  0.000000
9/9/2011	9:05:58 PM	SiCl4 MFC set to  0.000000
9/9/2011	9:05:58 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:05:59 PM	Tube furnace set to 1000
9/9/2011	9:06:00 PM	Helium valve closed
9/9/2011	9:06:00 PM	BCl3 valve closed
9/9/2011	9:06:00 PM	PH3 valve closed
9/9/2011	9:06:00 PM	SiCl4 pre valve closed
9/9/2011	9:06:00 PM	SiCl4 post valve closed
9/9/2011	9:06:00 PM	Main Vac valve closed
9/9/2011	9:06:00 PM	Bypass valve closed
9/9/2011	9:06:00 PM	H2 valve opened
9/9/2011	9:06:00 PM	Bubbler valve opened
9/9/2011	9:06:00 PM	Helium MFC set to  0.000000
9/9/2011	9:06:00 PM	H2 MFC set to  500.000000
9/9/2011	9:06:00 PM	BCl3 MFC set to  0.000000
9/9/2011	9:06:00 PM	PHl3 MFC set to  0.000000
9/9/2011	9:06:00 PM	SiCl4 MFC set to  0.000000
9/9/2011	9:06:00 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:06:00 PM	Tube furnace set to 1000
9/9/2011	9:26:00 PM	Helium valve closed
9/9/2011	9:26:00 PM	PH3 valve closed
9/9/2011	9:26:00 PM	Main Vac valve closed
9/9/2011	9:26:00 PM	Bypass valve closed
9/9/2011	9:26:00 PM	H2 valve opened
9/9/2011	9:26:00 PM	BCl3 valve opened
9/9/2011	9:26:00 PM	SiCl4 pre valve opened
9/9/2011	9:26:00 PM	SiCl4 post valve opened
9/9/2011	9:26:00 PM	Bubbler valve opened
9/9/2011	9:26:00 PM	Helium MFC set to  0.000000
9/9/2011	9:26:00 PM	H2 MFC set to  500.000000
9/9/2011	9:26:00 PM	BCl3 MFC set to  2.500000
9/9/2011	9:26:00 PM	PHl3 MFC set to  0.000000
9/9/2011	9:26:00 PM	SiCl4 MFC set to  50.000000
9/9/2011	9:26:00 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:26:00 PM	Tube furnace set to 1000
9/9/2011	9:38:00 PM	Helium valve closed
9/9/2011	9:38:00 PM	PH3 valve closed
9/9/2011	9:38:00 PM	Main Vac valve closed
9/9/2011	9:38:00 PM	Bypass valve closed
9/9/2011	9:38:00 PM	H2 valve opened
9/9/2011	9:38:00 PM	BCl3 valve opened
9/9/2011	9:38:00 PM	SiCl4 pre valve opened
9/9/2011	9:38:00 PM	SiCl4 post valve opened
9/9/2011	9:38:00 PM	Bubbler valve opened
9/9/2011	9:38:00 PM	Helium MFC set to  0.000000
9/9/2011	9:38:00 PM	H2 MFC set to  500.000000
9/9/2011	9:38:00 PM	BCl3 MFC set to  25.000000
9/9/2011	9:38:00 PM	PHl3 MFC set to  0.000000
9/9/2011	9:38:00 PM	SiCl4 MFC set to  50.000000
9/9/2011	9:38:00 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:38:00 PM	Tube furnace set to 1000
9/9/2011	9:38:15 PM	Helium valve closed
9/9/2011	9:38:15 PM	BCl3 valve closed
9/9/2011	9:38:15 PM	PH3 valve closed
9/9/2011	9:38:15 PM	SiCl4 pre valve closed
9/9/2011	9:38:15 PM	SiCl4 post valve closed
9/9/2011	9:38:15 PM	Main Vac valve closed
9/9/2011	9:38:15 PM	Bypass valve closed
9/9/2011	9:38:15 PM	H2 valve opened
9/9/2011	9:38:15 PM	Bubbler valve opened
9/9/2011	9:38:15 PM	Helium MFC set to  0.000000
9/9/2011	9:38:15 PM	H2 MFC set to  500.000000
9/9/2011	9:38:15 PM	BCl3 MFC set to  0.000000
9/9/2011	9:38:15 PM	PHl3 MFC set to  0.000000
9/9/2011	9:38:15 PM	SiCl4 MFC set to  0.000000
9/9/2011	9:38:15 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:38:15 PM	Tube furnace set to 750
9/9/2011	9:43:15 PM	H2 valve closed
9/9/2011	9:43:15 PM	BCl3 valve closed
9/9/2011	9:43:15 PM	PH3 valve closed
9/9/2011	9:43:15 PM	SiCl4 pre valve closed
9/9/2011	9:43:15 PM	SiCl4 post valve closed
9/9/2011	9:43:15 PM	Main Vac valve closed
9/9/2011	9:43:15 PM	Bypass valve closed
9/9/2011	9:43:15 PM	Helium valve opened
9/9/2011	9:43:15 PM	Bubbler valve opened
9/9/2011	9:43:15 PM	Helium MFC set to  500.000000
9/9/2011	9:43:15 PM	H2 MFC set to  0.000000
9/9/2011	9:43:15 PM	BCl3 MFC set to  0.000000
9/9/2011	9:43:15 PM	PHl3 MFC set to  0.000000
9/9/2011	9:43:15 PM	SiCl4 MFC set to  0.000000
9/9/2011	9:43:15 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	9:43:15 PM	Tube furnace set to 0
9/9/2011	10:03:15 PM	Helium valve closed
9/9/2011	10:03:15 PM	H2 valve closed
9/9/2011	10:03:15 PM	BCl3 valve closed
9/9/2011	10:03:15 PM	PH3 valve closed
9/9/2011	10:03:15 PM	SiCl4 pre valve closed
9/9/2011	10:03:15 PM	SiCl4 post valve closed
9/9/2011	10:03:15 PM	Main Vac valve closed
9/9/2011	10:03:15 PM	Bypass valve closed
9/9/2011	10:03:15 PM	Bubbler valve closed
9/9/2011	10:03:15 PM	Helium MFC set to  0.000000
9/9/2011	10:03:15 PM	H2 MFC set to  0.000000
9/9/2011	10:03:15 PM	BCl3 MFC set to  0.000000
9/9/2011	10:03:15 PM	PHl3 MFC set to  0.000000
9/9/2011	10:03:15 PM	SiCl4 MFC set to  0.000000
9/9/2011	10:03:15 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	10:03:16 PM	Tube furnace set to 0
9/9/2011	11:03:16 PM	H2 valve closed
9/9/2011	11:03:16 PM	BCl3 valve closed
9/9/2011	11:03:16 PM	PH3 valve closed
9/9/2011	11:03:16 PM	SiCl4 pre valve closed
9/9/2011	11:03:16 PM	SiCl4 post valve closed
9/9/2011	11:03:16 PM	Main Vac valve closed
9/9/2011	11:03:16 PM	Bypass valve closed
9/9/2011	11:03:16 PM	Bubbler valve closed
9/9/2011	11:03:16 PM	Helium valve opened
9/9/2011	11:03:16 PM	Helium MFC set to  500.000000
9/9/2011	11:03:16 PM	H2 MFC set to  0.000000
9/9/2011	11:03:16 PM	BCl3 MFC set to  0.000000
9/9/2011	11:03:16 PM	PHl3 MFC set to  0.000000
9/9/2011	11:03:16 PM	SiCl4 MFC set to  0.000000
9/9/2011	11:03:16 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	11:03:16 PM	Tube furnace set to 0
9/9/2011	11:03:21 PM	H2 valve closed
9/9/2011	11:03:21 PM	BCl3 valve closed
9/9/2011	11:03:21 PM	PH3 valve closed
9/9/2011	11:03:21 PM	SiCl4 pre valve closed
9/9/2011	11:03:21 PM	SiCl4 post valve closed
9/9/2011	11:03:21 PM	Main Vac valve closed
9/9/2011	11:03:21 PM	Bypass valve closed
9/9/2011	11:03:21 PM	Helium valve opened
9/9/2011	11:03:21 PM	Bubbler valve opened
9/9/2011	11:03:21 PM	Helium MFC set to  500.000000
9/9/2011	11:03:21 PM	H2 MFC set to  0.000000
9/9/2011	11:03:21 PM	BCl3 MFC set to  0.000000
9/9/2011	11:03:21 PM	PHl3 MFC set to  0.000000
9/9/2011	11:03:22 PM	SiCl4 MFC set to  0.000000
9/9/2011	11:03:22 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	11:03:22 PM	Tube furnace set to 0
9/9/2011	11:08:22 PM	Helium valve closed
9/9/2011	11:08:22 PM	H2 valve closed
9/9/2011	11:08:22 PM	BCl3 valve closed
9/9/2011	11:08:22 PM	PH3 valve closed
9/9/2011	11:08:22 PM	SiCl4 pre valve closed
9/9/2011	11:08:22 PM	SiCl4 post valve closed
9/9/2011	11:08:22 PM	Main Vac valve closed
9/9/2011	11:08:22 PM	Bypass valve closed
9/9/2011	11:08:22 PM	Bubbler valve closed
9/9/2011	11:08:22 PM	Helium MFC set to  0.000000
9/9/2011	11:08:22 PM	H2 MFC set to  0.000000
9/9/2011	11:08:22 PM	BCl3 MFC set to  0.000000
9/9/2011	11:08:22 PM	PHl3 MFC set to  0.000000
9/9/2011	11:08:22 PM	SiCl4 MFC set to  0.000000
9/9/2011	11:08:22 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	11:08:22 PM	Tube furnace set to 0
9/9/2011	11:08:23 PM	Helium valve closed
9/9/2011	11:08:23 PM	H2 valve closed
9/9/2011	11:08:23 PM	BCl3 valve closed
9/9/2011	11:08:23 PM	PH3 valve closed
9/9/2011	11:08:23 PM	SiCl4 pre valve closed
9/9/2011	11:08:23 PM	SiCl4 post valve closed
9/9/2011	11:08:23 PM	Main Vac valve closed
9/9/2011	11:08:23 PM	Bubbler valve closed
9/9/2011	11:08:23 PM	Bypass valve opened
9/9/2011	11:08:23 PM	Helium MFC set to  0.000000
9/9/2011	11:08:23 PM	H2 MFC set to  0.000000
9/9/2011	11:08:23 PM	BCl3 MFC set to  0.000000
9/9/2011	11:08:23 PM	PHl3 MFC set to  0.000000
9/9/2011	11:08:23 PM	SiCl4 MFC set to  0.000000
9/9/2011	11:08:23 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	11:08:23 PM	Tube furnace set to 0
9/9/2011	11:09:12 PM	Helium valve closed
9/9/2011	11:09:12 PM	H2 valve closed
9/9/2011	11:09:12 PM	BCl3 valve closed
9/9/2011	11:09:12 PM	PH3 valve closed
9/9/2011	11:09:12 PM	SiCl4 pre valve closed
9/9/2011	11:09:12 PM	SiCl4 post valve closed
9/9/2011	11:09:12 PM	Main Vac valve closed
9/9/2011	11:09:12 PM	Bubbler valve closed
9/9/2011	11:09:12 PM	Bypass valve opened
9/9/2011	11:09:12 PM	Helium MFC set to  0.000000
9/9/2011	11:09:12 PM	H2 MFC set to  0.000000
9/9/2011	11:09:12 PM	BCl3 MFC set to  0.000000
9/9/2011	11:09:12 PM	PHl3 MFC set to  0.000000
9/9/2011	11:09:12 PM	SiCl4 MFC set to  0.000000
9/9/2011	11:09:12 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	11:09:12 PM	Tube furnace set to 0
9/9/2011	11:10:12 PM	Helium valve closed
9/9/2011	11:10:12 PM	H2 valve closed
9/9/2011	11:10:12 PM	BCl3 valve closed
9/9/2011	11:10:12 PM	PH3 valve closed
9/9/2011	11:10:12 PM	SiCl4 pre valve closed
9/9/2011	11:10:12 PM	SiCl4 post valve closed
9/9/2011	11:10:12 PM	Bypass valve closed
9/9/2011	11:10:12 PM	Bubbler valve closed
9/9/2011	11:10:12 PM	Main Vac valve opened
9/9/2011	11:10:12 PM	Helium MFC set to  0.000000
9/9/2011	11:10:12 PM	H2 MFC set to  0.000000
9/9/2011	11:10:12 PM	BCl3 MFC set to  0.000000
9/9/2011	11:10:12 PM	PHl3 MFC set to  0.000000
9/9/2011	11:10:12 PM	SiCl4 MFC set to  0.000000
9/9/2011	11:10:12 PM	Bypass solenoid MFC set to  0.000000
9/9/2011	11:10:12 PM	Tube furnace set to 0
9/9/2011	11:10:13 PM	Run finished at 11:10 PM
